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HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥100%, Low-Metal (LM) grade
Flammable
Corrosive
Irritant
HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥100%, Low-Metal (LM) grade
Supplier:  Transene
Certificates
Flammable
Corrosive
Irritant
HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥100%, Low-Metal (LM) grade
Supplier:  Transene

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Specification Test Results

  • Assay (HMDS):
    99.92 min %
  • Water (H2O):
    50 ppm max.
  • Color:
    10 APHA max.
  • Chloride (Cl):
    2 ppm max.
  • Trailing Impurity:
    0.024 % max.
  • UV abs at 270 nm:
    0.039-0.115
  • Aluminum (Al):
    0.8 ppb max.
  • Arsenic and Antimony (as As):
    0.4 ppb max.
  • Barium (Ba):
    0.03 ppb max.
  • Beryllium (Be):
    0.16 ppb max.
  • Bismuth (Bi):
    0.02 ppb max.
  • Boron (B):
    3 ppb max.
  • Cadmium (Cd):
    0.2 ppb max.
  • Calcium (Ca):
    2.2 ppb max.
  • Chromium (Cr):
    1 ppb max.
  • Cobalt (Co):
    0.1 ppb max.
  • Copper (Cu):
    0.5 ppb max.
  • Gallium (Ga):
    0.1 ppb max.
  • Germanium (Ge):
    0.12 ppb max.
  • Gold (Au):
    0.08 ppb max.
  • Iron (Fe):
    0.2 ppb max.
  • Lead (Pb):
    0.2 ppb max.
  • Lithium (Li):
    0.1 ppb max.
  • Magnesium (Mg):
    0.3 ppb max.
  • Manganese (Mn):
    0.2 ppb max.
  • Molybdenum (Mo):
    0.3 ppb max.
  • Nickel (Ni):
    0.4 ppb max.
  • Potassium (K):
    0.4 ppb max.
  • Silver (Ag):
    0.1 ppb max.
  • Sodium (Na):
    0.88 ppb max.
  • Strontium (Sr):
    0.1 ppb max.
  • Tantalum (Ta):
    0.12 ppb max.
  • Thallium (Tl):
    2 ppb max.
  • Tin (Sn):
    0.2 ppb max.
  • Titanium (Ti):
    2 ppb max.
  • Vanadium (V):
    0.4 ppb max.
  • Zinc (Zn):
    0.7 ppb max.
  • Zirconium (Zr):
    0.2 ppb max.
  • Particle Count, 1.0 mm:
    10 ct/ml max.
  • Particle Count, 0.5 mm:
    20 ct/ml max.
  • Particle Count, 0.3 mm:
    50 ct/ml max.
  • Particle Count, 0.2 mm:
    90 ct/ml max.

Specification Test Results

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