Vacuum chamber PM ScrubKITS™ are pre-packed maintenance kits containing all the tools necessary to safely PM CVD, Plasma Etch, PVD, PECVD, MOCVD, ion implant and ALD vacuum chambers. Vacuum chamber ScrubKITS™ allow equipment and process engineers to strictly control the items used to PM vacuum chambers.

• Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear
• The fiber-free construction of ScrubDISKS® greatly reduces particle levels in cleaned vacuum chambers
• Unique bonding technology minimizes the release of abrasive particles leading to cleaner vacuum chamber PM procedures