NanoSHIELD hollow fiber series family of products is offered in several configurations to allow the end user to match the volume of fluid with the appropriate filter in an effort to reduce chemical waste.

• LDC Capsules for pilot scale production up to 100 gallons
• PP and PE Construction for excellent chemical resistance to photoresists and ancillary chemicals
• No IPA pre-wetting and system flushing required
• 0.005 to 0.1 μm Retention ratings provide superior removal of particles, gels, and micro-bubbles
• Reduced micro-bridge and wafer level defects

NanoSHIELD™ LDC series hollow fiber filter capsules are specially designed to combine the highest level of particle retention with superior flow rates and minimal pressure drop for demanding high viscosity chemical applications.

Utilizing Hollow Fiber Technology (HFT), NanoSHIELD hollow fiber filters are able to deliver high flow rates with low hold-up volume, to minimize the waste of experimental photoresist formulations.

All filters are critically cleaned, integrity tested, and rinsed with high purity water to provide fast start-up times and low extractables right out of the box. NanoSHIELD LDC series hollow fiber filter capsules are ideally suited for critical applications requiring low hold-up volume with superior flow rates and high particle retention from 100 nm down to 5 nm.

Hollow Fiber Technology provides more filtration per surface area as compared to pleated filters, and both lower operating and differential pressure across the filter to minimize outgassing and micro-bubble formation.