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HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥99.5% VLSI, Electronic Grade
HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥99.5% VLSI, Electronic Grade
Catalog # VWRC6686.2500
Supplier:  VWR Chemicals
CAS Number:  
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HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥99.5% VLSI, Electronic Grade
Catalog # VWRC6686.2500
Supplier:  VWR Chemicals
CAS Number:  

Specifications

  • Pack type:
    Glass bottle
  • Pk:
    2,5 L
  • Seq:
    5096
  • Environmentally Preferable:

Specifications

Specification Test Results

  • Assay (GC):
    ≥ 99.5 %
  • Impurity profile (GC) :
    Conforms
  • Colouration:
    ≤ 10 APHA
  • Particle size(0.50 μm)(/ml)(at filling):
    ≤ 200
  • Evaporation residue:
    ≤ 10 ppm
  • Water:
    ≤ 500 ppm
  • Cl (Chloride):
    ≤ 1000 ppb
  • Ag (Silver):
    ≤ 10 ppb
  • Al (Aluminium):
    ≤ 100 ppb
  • As (Arsenic):
    ≤ 10 ppb
  • Au (Gold):
    ≤ 20 ppb
  • B (Boron):
    ≤ 10 ppb
  • Ba (Barium):
    ≤ 20 ppb
  • Be (Beryllium):
    ≤ 10 ppb
  • Bi (Bismuth):
    ≤ 20 ppb
  • Ca (Calcium):
    ≤ 100 ppb
  • Cd (Cadmium):
    ≤ 10 ppb
  • Co (Cobalt):
    ≤ 10 ppb
  • Cr (Chromium):
    ≤ 10 ppb
  • Cu (Copper):
    ≤ 10 ppb
  • Fe (Iron):
    ≤ 50 ppb
  • Ga (Gallium):
    ≤ 10 ppb
  • In (Indium):
    ≤ 10 ppb
  • K (Potassium):
    ≤ 20 ppb
  • Li (Lithium):
    ≤ 10 ppb
  • Mg (Magnesium):
    ≤ 20 ppb
  • Mn (Manganese):
    ≤ 10 ppb
  • Mo (Molybdenum):
    ≤ 10 ppb
  • Na (Sodium):
    ≤ 100 ppb
  • Ni (Nickel):
    ≤ 10 ppb
  • Pb (Lead):
    ≤ 10 ppb
  • Pt (Platinum):
    ≤ 50 ppb
  • Sb (Antimony):
    ≤ 10 ppb
  • Sn (Tin):
    ≤ 20 ppb
  • Sr (Strontium):
    ≤ 10 ppb
  • Ti (Titanium):
    ≤ 20 ppb
  • Tl (Thallium):
    ≤ 10 ppb
  • V (Vanadium):
    ≤ 10 ppb
  • Zn (Zinc):
    ≤ 20 ppb
  • Zr (Zirconium):
    ≤ 20 ppb

Specification Test Results

About this item

Synonyms: Hexamethyldisilazane
 :
 :161.39 g/mol
Density:0.78 g/cm³ (20 °C)
Storage Temperature:Ambient
EINECS:213-668-5
UN:1992
ADR:3 (6.1, 8),II
 :GHS02
 :GHS06
CAS Number:999-97-3
Formula:(CH₃)₃SiNHSi(CH₃)₃
MDL Number:MFCD00008259