Flammable
Toxic HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥99.5% VLSI, Electronic Grade
Catalog # VWRC6686.2500
Supplier: VWR Chemicals
CAS Number:
Specifications
- Pack type:Glass bottle
- Pk:2,5 L
- Seq:5096
Specifications
Specification Test Results
- Assay (GC):≥ 99.5 %
- Impurity profile (GC) :Conforms
- Colouration:≤ 10 APHA
- Particle size(0.50 μm)(/ml)(at filling):≤ 200
- Evaporation residue:≤ 10 ppm
- Water:≤ 500 ppm
- Cl (Chloride):≤ 1000 ppb
- Ag (Silver):≤ 10 ppb
- Al (Aluminium):≤ 100 ppb
- As (Arsenic):≤ 10 ppb
- Au (Gold):≤ 20 ppb
- B (Boron):≤ 10 ppb
- Ba (Barium):≤ 20 ppb
- Be (Beryllium):≤ 10 ppb
- Bi (Bismuth):≤ 20 ppb
- Ca (Calcium):≤ 100 ppb
- Cd (Cadmium):≤ 10 ppb
- Co (Cobalt):≤ 10 ppb
- Cr (Chromium):≤ 10 ppb
- Cu (Copper):≤ 10 ppb
- Fe (Iron):≤ 50 ppb
- Ga (Gallium):≤ 10 ppb
- In (Indium):≤ 10 ppb
- K (Potassium):≤ 20 ppb
- Li (Lithium):≤ 10 ppb
- Mg (Magnesium):≤ 20 ppb
- Mn (Manganese):≤ 10 ppb
- Mo (Molybdenum):≤ 10 ppb
- Na (Sodium):≤ 100 ppb
- Ni (Nickel):≤ 10 ppb
- Pb (Lead):≤ 10 ppb
- Pt (Platinum):≤ 50 ppb
- Sb (Antimony):≤ 10 ppb
- Sn (Tin):≤ 20 ppb
- Sr (Strontium):≤ 10 ppb
- Ti (Titanium):≤ 20 ppb
- Tl (Thallium):≤ 10 ppb
- V (Vanadium):≤ 10 ppb
- Zn (Zinc):≤ 20 ppb
- Zr (Zirconium):≤ 20 ppb
Specification Test Results
About this item
:
:161.39 g/mol
Density:0.78 g/cm³ (20 °C)
Storage Temperature:Ambient
EINECS:213-668-5
UN:1992
ADR:3 (6.1, 8),II
:GHS02
:GHS06
CAS Number:999-97-3
Formula:(CH₃)₃SiNHSi(CH₃)₃
MDL Number:MFCD00008259