Inline gas filters, Wafergard® GT-Plus
Catalog # ENTEWGFG21KP0
Supplier: ENTEGRIS
Specifications
- Material:PTFE
- Description:Inline gas filter, Wafergard® GT-Plus
- Seq:03
- Environmentally Preferable:
- Max. differential pressure:Forward: 3,4 bar at 20 °C
Reverse: 0,3 bar at 20 °C - Fitting size:1/4" compression seal
- Filter:0,003 µm
- Ø×L:21,5×71,5 mm
- Max. operating pressure:4,1 bar @ 20 °C
- Max. flow rate:30 l/min
- Max. operating temperature:50 °C
- Model:1/4" compression seal
- Pk:1 SET
Specifications
About this item
These inline gas filters are designed to removed particles from inert gases for flow rates up to 30 L/min.
- Particle retention of >99,99% removal of all particles greater than 0,003 µm diameter
- Can be used with low air intake filter, wafer transport system and clean dry air system
Supports/housing: PFA; membrane: PTFE
Filtration area: 12 cm²