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Inline gas filters, Wafergard® GT-Plus
Inline gas filters, Wafergard® GT-Plus
Catalog # ENTEWGFG21KP0
Supplier:  ENTEGRIS
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Inline gas filters, Wafergard® GT-Plus
Catalog # ENTEWGFG21KP0
Supplier:  ENTEGRIS

Specifications

  • Material:
    PTFE
  • Description:
    Inline gas filter, Wafergard® GT-Plus
  • Seq:
    03
  • Environmentally Preferable:
  • Max. differential pressure:
    Forward: 3,4 bar at 20 °C
    Reverse: 0,3 bar at 20 °C
  • Fitting size:
    1/4" compression seal
  • Filter:
    0,003 µm
  • Ø×L:
    21,5×71,5 mm
  • Max. operating pressure:
    4,1 bar @ 20 °C
  • Max. flow rate:
    30 l/min
  • Max. operating temperature:
    50 °C
  • Model:
    1/4" compression seal
  • Pk:
    1 SET

Specifications

About this item

These inline gas filters are designed to removed particles from inert gases for flow rates up to 30 L/min.

  • Particle retention of >99,99% removal of all particles greater than 0,003 µm diameter
  • Can be used with low air intake filter, wafer transport system and clean dry air system

Supports/housing: PFA; membrane: PTFE

Filtration area: 12 cm²