Supplier: ENTEGRIS

ETFE, white. Durable forceps for substrate handling.

Supplier: ENTEGRIS

Entegris offers a wide selection of H 20 series 2" square trays, covers and accessories to meet your changing needs. H 20 series trays are available in various pocket sizes and depths, with or without wash holes and tweezers slots. H 20 series products offer proven reliability for handling bare die, including:

Supplier: ENTEGRIS

Wafer handling trays to safely transport and protect silicon wafers.

Supplier: ENTEGRIS

These filters are compatible with high purity gases as well as general nitrogen and CDA applications. Available in Bronze and Silver performance levels, they are specifically designed for high flow and low delta pressure applications and provide ultimate process protection by removing contaminants that could affect process quality.

Supplier: ENTEGRIS

O-ring free design, ¹/₂ or ¹/₄" orifice.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three-ported directional valve enables simplification of piping system design while minimising its footprint. All PFA wetted surfaces for ultrapure and corrosion resistant performance.

Supplier: ENTEGRIS

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Use them in gas panels and gas cabinets where ultrapure gas is required for wafer processing.

Supplier: ENTEGRIS

These are compact, all-metal filters that fit in place of standard ¹/₄", ³/₈" and ¹/₂" VCR® gaskets in gas distribution systems. They protect sensitive gas components, such as mass flow controllers, regulators and valves from particle damage in applications up to 400 °C.

Supplier: ENTEGRIS

Provide excellent security for masks and reticles with pellicles.

Supplier: ENTEGRIS

Two- or three-way diaphragm valves, ¹/₄" orifice, normally closed.

Supplier: ENTEGRIS

Flaretek®, 1" tube flaring mandrel

Supplier: ENTEGRIS

Microgard UPE/UPX filters do not require prewetting with solvent-based photochemicals. All PE construction lowers metallic and ionic contamination that can leach from filters that are manufactured with materials such as PP and nylon.

Supplier: ENTEGRIS

This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.

Supplier: ENTEGRIS

Wafer handling, Wafer storage boxes for 2,5" and smaller wafer handling, E 04 series, Polystyrene, Black

Supplier: ENTEGRIS

For shipping and storage applications. Holds one wafer face down contacting only the wafer's edges. Replaceable cushions securely retain the wafer to minimise particle generation. Single latch provides secure closure and easy opening.

Supplier: ENTEGRIS

Injection molded round tank, in PFA material.

Supplier: ENTEGRIS

These cartridge filters are widely used in chemical, electronic and semiconductor industries for liquid and gas prefiltration applications. They retain contaminants by means of a multi-stage, graded density design.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Valve design allows ultrapure water to continuously bypass the diaphragm, eliminating water stagnation and bacteria formation in the valve. Manually adjustable, integral needle valve provides precise control of bypass flow.

Supplier: ENTEGRIS

Made of PFA, DuPont 450.

Supplier: ENTEGRIS

Offers precise point-of-use chemical flow control and is designed for point-of-use blending and dispense applications requiring medium to high flow rates (2,5 to 40 L/min).

Supplier: ENTEGRIS

Wafer handling trays to safely transport and protect silicon wafers.

Supplier: ENTEGRIS

These components are constructed of high purity PFA and PTFE materials for wetted parts and PVDF, PEEK™ and PTFE u-cup with Viton® energizer for non wetted parts.

Supplier: ENTEGRIS

1,5” Kapton® wrap, For: Cynergy Weld-in-Place

Supplier: ENTEGRIS

HDPE, triple layer.

Supplier: ENTEGRIS

Single wafer tray, H 20 series, 1,2"

Supplier: ENTEGRIS

Injection molded rectangular tanks with dual capacity.

Supplier: ENTEGRIS

Savana® Lab Disc disposable filters have been specially designed for simple, quick and efficient filtration of liquids used in laboratory, pilot and small-scale applications.

Supplier: ENTEGRIS

Accessory for flow meters, Cable (1,83 m) with 8-pin mating for NT® Flowmeters (for electrical connector type D00 only)

Supplier: ENTEGRIS

Wafergard®, Gas filter, Wafergard® GN, For: Gas filter gun, Wafergard® GN

Supplier: ENTEGRIS

Wafergard®, PFA compression ferrules and nuts, 6,34 mm, For: Inline gas filters, Wafergard® GT-Plus