Supplier: ENTEGRIS

Superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents.

Supplier: ENTEGRIS

Squeeze style handles.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers are designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical.

Supplier: ENTEGRIS

GateKeeper® Heated Getter Units (HGU) are ideal solutions for point-of-use purification where CH4 or N2 impurity removal is required. Gases purified include Ar, He, Xe, N2, and H2.

Supplier: ENTEGRIS

These cartridge filters are suited for acids, bases, process water, solvents, dyes and lacquers in flat panel display and chemical manufacturing.

Supplier: ENTEGRIS

SmartStack® horizontal wafer shipping system is designed to reduce wafer breakage, die bond corrosion and particle contamination. These shipping system is designed to utilize common secondary packaging across wafer sizes, and the result is reduction in the number of pacvkaging configurations and wafer packing process. With additional layer of protection it is easy to maintain wafer integrity during transport and shipping.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Allows continuous flow through parallel ports. When actuated, the sample port opens allowing fluid to flow out or in. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

Supplier: ENTEGRIS

Glass-filled PP, white. Straight forceps for substrate handling.

Supplier: ENTEGRIS

Advanced wafer isolation for 200 mm fabs. Trends in wafer processing technology have mandated advancements in wafer handling technology to support today's advanced semiconductor processing facilities. Advanced wafer isolation pods provide wafer isolation, and coupled with advanced wafer transport carriers, offer performance benefits over traditional wafer carriers and storage boxes. The M20X Series 200 mm Pod is a component of Silicon Delivery™ Systems and Services – Entegris's unique materials integrity management solution to cost effectively manage silicon from production to consumption.

Supplier: ENTEGRIS

Squeeze style
Attaches to the notches on both end walls of carrier
Overall size: 163×140×183 mm
Compatible with all 'M' style carriers

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

Holds a wafer or a square plate.

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

These integral ferrule fittings are made from PFA.

Supplier: ENTEGRIS

Made of PFA, DuPont 440.

Supplier: ENTEGRIS

The Sentry® QCIII Quick Connect System is the safest and easiest method of connecting FluoroPure® chemical containers with typical bulk chemical delivery systems. This patented connection system is key coded and uses Entegris' industry leading Flaretek® seal for the main chemical dispense line and radial seals for the remaining three ports. This new system allows the connection to be made without realigning key codes. Subsequent ports have radial seals with FEP encapsulated o-rings. This chemical dispense system incorporates a ³/₄" chemical fill/dispense port, ½" vent port, ¼" connection verification port and optional ³/₄" recirculation port.

Supplier: ENTEGRIS

ETFE, white.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

Supplier: ENTEGRIS

These cartridge filters are designed for the removal of particles and microorganisms from liquids and gases. Used in clarification and prefiltration applications, these pleated filters retain contaminants primarily on the surface of the filter media. Downstream filter performance is enhanced due to efficient particle and microorganism reduction.

Supplier: ENTEGRIS

Multipurpose trays for a wide range of uses.

Supplier: ENTEGRIS

For masks or reticles with pellicles. Label for identication labels. Landing pads prevent tearing of pellicies.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

Automated, FIMS compatible SB300 FOSB provides a clean, secure environment for valuable 300 mm wafers as they move through numerous handling and transport processes.

Supplier: ENTEGRIS

Entegris GateKeeper® GPU gas purifiers were designed
to improve purity consistency, lifetime, and final purity in
microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of HX gas purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

Offers precise point-of-use chemical flow control and is designed for point-of-use blending and dispense applications requiring medium to high flow rates (2,5 to 40 L/min).

Supplier: ENTEGRIS

Entegris offers a wide selection of H 20 series 2" square trays, covers and accessories to meet your changing needs. H 20 series trays are available in various pocket sizes and depths, with or without wash holes and tweezers slots. H 20 series products offer proven reliability for handling bare die, including:

Supplier: ENTEGRIS

Smaller than most comparable valves, ¹/₄" CR4 series valves are ideal for handling wet etch and clean process chemicals. These durable valves can handle temperatures up to 160 °C at 276 kPa.

Supplier: ENTEGRIS

Savana® Lab Disc disposable filters have been specially designed for simple, quick and efficient filtration of liquids used in laboratory, pilot and small-scale applications.