Supplier: ENTEGRIS

Interlocking tabs press on the center of the tray for secure contact between the tray and cover.

Supplier: ENTEGRIS

Made of high purity PFA and PTFE (all wetted parts).

Supplier: ENTEGRIS

Clip, Pair of clips, For: One tray and one cover

Supplier: ENTEGRIS

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.

Supplier: ENTEGRIS

Nest between H 44 trays and/or covers.

Supplier: ENTEGRIS

Long lasting and reliable PFA nitrogen spray guns with 0,5 µm PTFE membrane for use in high purity and corrosive chemical applications.

Supplier: ENTEGRIS

The H 93 single wafer shipper is designed to securely retain the wafer and minimise particle generation. Stackable with multiple closures, each shipper holds one 300 mm wafer facedown contacting only the wafer’s edges.

Supplier: ENTEGRIS

This gas filter gun is designed for point-of-use filtration of compressed gas.

Supplier: ENTEGRIS

Available for 1,0"; 1,5"; 2,0" and 2,5" wafers. Large area on cover provides space for labelling.

Supplier: ENTEGRIS

For shipping and storage applications. Holds one wafer facedown contacting only the wafer's edges.

Supplier: ENTEGRIS

H 22 Series
Conical pocket holds one wafer facedown contacting only the wafer’s edges.

Supplier: ENTEGRIS

Nest between H 20 trays and/or covers.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers are designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical.

Supplier: ENTEGRIS

GateKeeper® Heated Getter Units (HGU) are ideal solutions for point-of-use purification where CH4 or N2 impurity removal is required. Gases purified include Ar, He, Xe, N2, and H2.

Supplier: ENTEGRIS

SmartStack® horizontal wafer shipping system is designed to reduce wafer breakage, die bond corrosion and particle contamination. These shipping system is designed to utilize common secondary packaging across wafer sizes, and the result is reduction in the number of pacvkaging configurations and wafer packing process. With additional layer of protection it is easy to maintain wafer integrity during transport and shipping.

Supplier: ENTEGRIS

Galtek®, Half nut ferrule, with hex 15/16", Length: 6,4 mm, For tubing ext.Ø: 3/8", 10 mm

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

CR4 pneumatic valves are specially designed to handle temperatures upto 160 °C. There is a option to add ¼" and ¹/₈" connections from Flaretek®. With no exposed metal hardware the valve is completely sealed and protected from harsh chemical environments.

Supplier: ENTEGRIS

Advanced wafer isolation for 200 mm fabs. Trends in wafer processing technology have mandated advancements in wafer handling technology to support today's advanced semiconductor processing facilities. Advanced wafer isolation pods provide wafer isolation, and coupled with advanced wafer transport carriers, offer performance benefits over traditional wafer carriers and storage boxes. The M20X Series 200 mm Pod is a component of Silicon Delivery™ Systems and Services – Entegris's unique materials integrity management solution to cost effectively manage silicon from production to consumption.

Supplier: ENTEGRIS

Squeeze style handles.

Supplier: ENTEGRIS

These integral ferrule fittings are made from PFA.

Supplier: ENTEGRIS

These wafer baskets made of PFA are designed for processing and handling substrates. They are compatible with tanks and handles.

Supplier: ENTEGRIS

Superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents.

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Allows continuous flow through parallel ports. When actuated, the sample port opens allowing fluid to flow out or in. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

Supplier: ENTEGRIS

E 99 Series

Supplier: ENTEGRIS

These cartridge filters are suited for acids, bases, process water, solvents, dyes and lacquers in flat panel display and chemical manufacturing.

Supplier: ENTEGRIS

Conical pocket holds one wafer face down contacting only the wafer edges.

Supplier: ENTEGRIS

Provides excellent security for masks or reticles with pellicles.

Supplier: ENTEGRIS

Glass-filled PP, white. Straight forceps for substrate handling.