Inserts for trays H 44 series
Supplier: ENTEGRIS
Nest between H 44 trays and/or covers.
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Nitrogen spray gun
Supplier: ENTEGRIS
Long lasting and reliable PFA nitrogen spray guns with 0,5 µm PTFE membrane for use in high purity and corrosive chemical applications.
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Single wafer shippers, H 22 series
Supplier: ENTEGRIS
Available for 1,0"; 1,5"; 2,0" and 2,5" wafers. Large area on cover provides space for labelling.
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Gas filter gun, Wafergard® GN
Supplier: ENTEGRIS
This gas filter gun is designed for point-of-use filtration of compressed gas.
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Clips for 4" chip trays, H 44 Series
Supplier: ENTEGRIS
Interlocking tabs press on the center of the tray for secure contact between the tray and cover.
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Clips for 2" chip trays, H20 Series
Supplier: ENTEGRIS
Clip, One piece clip, For: Tray on tray or cover on tray
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Inline gas filters, Wafergard® II F Micro
Supplier: ENTEGRIS
Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.
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Single wafer shipper, for 300 mm wafer handling, H 93 series
Supplier: ENTEGRIS
The H 93 single wafer shipper is designed to securely retain the wafer and minimise particle generation. Stackable with multiple closures, each shipper holds one 300 mm wafer facedown contacting only the wafer’s edges.
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Single wafer shipping boxes for 200 mm wafer handling, H 93 series
Supplier: ENTEGRIS
For shipping and storage applications. Holds one wafer facedown contacting only the wafer's edges.
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Single wafer shippers, for 4" (100 mm) wafer handling, H 22/H 93 series
Supplier: ENTEGRIS
H 22 Series
Conical pocket holds one wafer facedown contacting only the wafer’s edges.
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Inserts for trays H 20 series
Supplier: ENTEGRIS
Nest between H 20 trays and/or covers.
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Integra® Pneumatic Valves, 12,7 mm Orifice, 3-way
Supplier: ENTEGRIS
This high purity diversion valve minimises footprint chemical applications including CMP slurry.
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PFA housing heads and bowls, for cartridge filters, Chemlock®
Supplier: ENTEGRIS
PFA cartridge filter housing is the compact design, space-saving, enabes hassle-free cartridge changeouts (for safety and cleanliness) and reduced exposure to chemicals. It consists of lock-in design which perfectly seats the cartridge in the filter housing.
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Mask carriers, A 189 series
Supplier: ENTEGRIS
These carriers are designed to hold masks or reticles during transport. They can be used within diverse industries, such as semi-conductor data storage, chemical processing and fuel cell. The carriers can be combined with handles and/or shipping boxes (need to be ordered separately).
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Quick Connect System Sentry® QCII
Supplier: ENTEGRIS
The safe and convenient method of interfacing reusable FluoroPure® chemical containers with bulk delivery systems. The patented design is key coded to assure against unsafe chemical mixing while ensuring dedicated clean service. One connection provides dispensing, venting and level detection.
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Gas purifiers, GateKeeper® GPU 200 4R
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.
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Gas purifiers, GateKeeper® GPU 300 4R
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.
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GateKeeper® GPU CO Media Gas Purifier
Supplier: ENTEGRIS
Entegris GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of CO gas purification products that deliver unsurpassed value and performance.
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Planarcore® PVA Brush
Supplier: ENTEGRIS
Planarcore® PVA Brush is designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications.
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GateKeeper® GPU 200 F Gas Purifier
Supplier: ENTEGRIS
Entegris GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of EX gas purification products that deliver unsurpassed value and performance.
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Covers for 4" chip trays, H44
Supplier: ENTEGRIS
Tray covers in various standard materials are shown below.
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Bare die/CSP detail
Supplier: ENTEGRIS
Bare die/CSP tray detail, ChipSentry® (Black conductive polycarbonate)
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Single wafer tray, H 20 series, 150 mm
Supplier: ENTEGRIS
To support the semiconductor industry's requirements for advanced 150 mm wafer handling, Entegris offers a variety of wafer shipping and handling solutions to safely transport silicon wafers in today's 150 mm fabs.
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Mask carriers, E-series
Supplier: ENTEGRIS
These carriers are designed to hold masks or reticles during transport. Carriers and boxes purchased as an assembly.
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Disposable filters, Fluorogard® ATX
Supplier: ENTEGRIS
Disposable filters, Fluorogard® ATX
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Single wafer shipping boxes, for 150 mm wafer handling, H 22 series
Supplier: ENTEGRIS
For shipping and storage applications.
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Wafer carrier handles for 76,2 mm (3") wafer handling
Supplier: ENTEGRIS
Wafer carrier handles for 76,2 mm (3") wafer handling, Squeeze, A82M, PA82M wafer carriers, PFA, Natural