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Guardian™ PS UC Liquid Filter

Supplier: ENTEGRIS

Advanced, ultraclean (UC) filtration for critical dilute cleaning applications.

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Process wafer carriers, for 150 mm wafer handling, 182/190/194 Series

Process wafer carriers, for 150 mm wafer handling, 182/190/194 Series

Supplier: ENTEGRIS

182 Series
The industry standard 150 mm process wafer carrier. Four-point contact on the 'H' bar for improved wafer positioning. Open sidewall design to minimise liquid traps and promote even solution coverage and drainage. High profile design for maximum wafer protection.

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Pipe fittings, straight, PureBond®

Supplier: ENTEGRIS

These pipe fittings are made from PFA.

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Fluid aspirator, Galtek®

Fluid aspirator, Galtek®

Supplier: ENTEGRIS

Galtek® aspirator is ideal for the extraction and/or dilution of fluids from chemical tanks.

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Point of use photochemical filters, Optimizer®

Supplier: ENTEGRIS

Liquid photochemical filters designed for developer, DI water and solvent applications in POU photolithography processes.

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Tube fittings, tees, FlareLock® II

Supplier: ENTEGRIS

These tube fittings are made from PFA.

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Cartridge filters, Etchgard™ HP and HPX

Supplier: ENTEGRIS

These cartridge filters have superior retention efficiency with rapid particle removal and microbubble control which facilitates faster bath startup and system qualification.

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Tube fittings, nuts and caps, Flaretek®

Supplier: ENTEGRIS

These tube fittings are made from PVDF, PFA or CPFA.

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Integral ferrule groove tools, Galtek®

Supplier: ENTEGRIS

1. Slide the ferrule nut onto the tube past the groove.

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Film frame rings for wafers

Supplier: ENTEGRIS

Plastic film frame rings provide a cost-effective and light weight alternative to expensive, heavy, metal frames to handle wafers during assembly operations and can be used to store and ship finished wafers.

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Tube fittings, elbows, Flaretek®

Supplier: ENTEGRIS

These tube fittings are made from PFA.

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Wafer carrier handles for 125 mm (5") wafer handling
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Inline gas filters, Wafergard® GT-Plus

Inline gas filters, Wafergard® GT-Plus

Supplier: ENTEGRIS

These inline gas filters are designed to removed particles from inert gases for flow rates up to 30 L/min.

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Transport wafer carriers, for 150 mm wafer handling, 182/194/196 Series

Transport wafer carriers, for 150 mm wafer handling, 182/194/196 Series

Supplier: ENTEGRIS

These standard 150 mm wafer carriers feature a high rigidity and dimensional stability.

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Mask carriers

Mask carriers

Supplier: ENTEGRIS

Miscellaneous mask carriers.

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GateKeeper® GPU 10M 8 and 12R Gas Purifiers

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of WX and HX gas purification products that deliver unsurpassed value and performance.

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