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Planarcore® PVA Brush
Planarcore® PVA Brush
  ENTEPVP0L0TR4
 :  ENTEGRIS
New Product
Planarcore® PVA Brush
  ENTEPVP0L0TR4
 :  ENTEGRIS
New Product

 

  • Description:
    Planarcore polyvinyl alcohol brush for Lam OnTrak® 2 NH₄OH, Process platform: 200 mm, 4 per pack
  • Environmentally Preferable:
  • Pk:
    1

 

 

Planarcore® PVA Brush is designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications.

  • High-Purity PVA
  • Molded through the core construction
  • Eliminates alignment and gapping problems, increasing system throughput
  • Close molded technology
  • Reduces downtime on tool
  • Decreases defectivity on wafer

The unique molded-through-the-core technology provides absolute adhesion of the PVA to the brush core, unlike standard PVA products that are merely friction fitted to the core.