Planarcore® PVA Brush
ENTEPVP0L0TR4
: ENTEGRIS
New Product
- Description:Planarcore polyvinyl alcohol brush for Lam OnTrak® 2 NH₄OH, Process platform: 200 mm, 4 per pack
- Environmentally Preferable:
- Pk:1
Planarcore® PVA Brush is designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications.
- High-Purity PVA
- Molded through the core construction
- Eliminates alignment and gapping problems, increasing system throughput
- Close molded technology
- Reduces downtime on tool
- Decreases defectivity on wafer
The unique molded-through-the-core technology provides absolute adhesion of the PVA to the brush core, unlike standard PVA products that are merely friction fitted to the core.