Gas filters, FG series, Wafergard® SG
Supplier: ENTEGRIS
Certificates
About this item
Wafergard® SG FG series gas filters provide superior particulate filtration to maximise photovoltaic cell and display manufacturing production yields.
- Complatible with high-purity gases including N₂, CDA, H₂, SiH₄ and NF₃
- Superior downstream cleanliness with retention rate of 9 LRV at rated flow
Filter element: Hydrophobic PTFE membrane supported by molded PTFE, PFA structure and PFA O-ring; Housing: electropolished 316 L stainless steel
Maximum forward differential pressure: 4,14 bar at 23 °C
Maximum reverse differential pressure: 0,69 bar at 23 °C
Specifications
- Catalog No:
- ENTEWGFGMBRR2
- ENTEYY5032PS1
- ENTEWGFG50PR1
- ENTEWGFGMBSS2
- ENTEWGFGMBSS3
- ENTEWGFG02PR1
- ENTEWGFGT1PS1
- ENTEWGFGT1PR1
- ENTEYY5001HR1
- ENTEYY5032PR1
- ENTEWGFG32PS1
- ENTEWGFGMBSS4
- ENTEWGFGMBRR4
- ENTEWGFG02PS1
- ENTEYY5002PR1
- ENTEYY5001HS1
- Max. operating pressure:
- 40 bar @ 23 °C
- 200 bar @ 23 °C
- 200 bar @ 23 °C
- 40 bar @ 23 °C
- 40 bar @ 23 °C
- 200 bar @ 23 °C
- 200 bar @ 23 °C
- 200 bar @ 23 °C
- 200 bar @ 23 °C
- 200 bar @ 23 °C
- 200 bar @ 23 °C
- 40 bar @ 23 °C
- 40 bar @ 23 °C
- 200 bar @ 23 °C
- 200 bar @ 23 °C
- 200 bar @ 23 °C
- Leak rating:
- Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec - Qualified: 2×10⁻¹⁰ atm-cc/sec
Tested: 5×10⁻⁸ atm-cc/sec
- Max. operating temperature:
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- 120 °C in inert gases
- Fitting size:
- ¹/₄" gasket seal
- ³/₈" compression seal
- ¹/₂" gasket seal
- ¹/₄" compression seal
- ³/₈" compression seal
- ¹/₄" gasket seal
- ¹/₄" compression seal
- ¹/₄" gasket seal
- ¹/₄" gasket seal
- ³/₈" gasket seal
- ³/₈" compression seal
- ¹/₂" compression seal
- ¹/₂" gasket seal
- ¹/₄" compression seal
- ¹/₄" gasket seal
- ¹/₄" compression seal
- Filter:
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- 0,003 µm
- Ø×L:
- 127×35,5 mm
- 119,3×28,5 mm
- 127×28,4 mm
- 112,7×35,5 mm
- 117,9×35,5 mm
- 127×28,4 mm
- 73,7×19,05 mm
- 84,1×19,05 mm
- 84,1×19,05 mm
- 133,5×28,5 mm
- 115,5×28,4 mm
- 118,7×35,5 mm
- 127×35,5 mm
- 115,5×28,4 mm
- 127×28,5 mm
- 73,7×19,05 mm
Specifications
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