Inline gas filters, Wafergard® II F Mini XL

Supplier: ENTEGRIS

Supplier: ENTEGRIS

About this item

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Use them in gas panels and gas cabinets where ultrapure gas is required for wafer processing.

Superior particulate filtration for ultrapure gas system filtration
Low pressure drop reduces the risk of condensation in low vapour pressure gases
Cleanroom manufactured, welded and tested
PTFE membranes provide high efficiency filtration

Filter element: hydrophobic PTFE membrane supported by moulded PTFE PFA structure; housing: electropolished 316L stainless steel.

Applications: ozone applications (gas), gas cabinets, ultrapure gas systems, gas panels, valve manifold boxes.

Downstream cleanliness particles: Less than 0,03 particles/liter (<1 particle/0,028 m³) greater than 0,01 μm.

Downstream cleanliness volatiles: <10 ppb moisture.

Specifications

Catalog No:
ENTEWG2F32PS1
ENTEWG2F02RR2
ENTEWG2F02RR4
ENTEWG2F02PS1
ENTEWG2F02JJ4

Material:
PTFE
PTFE
PTFE
PTFE
PTFE

Max. differential pressure:
Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C
Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C
Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C
Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C
Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C

Max. operating pressure:
207 bar @ 23 °C
207 bar @ 23 °C
207 bar @ 23 °C
207 bar @ 23 °C
207 bar @ 23 °C

Leak rating:
Qualified: 2 x 10^-10 atm-cc/sec
Tested: 1 x 10^-9 atm-cc/sec
Qualified: 2 x 10^-10 atm-cc/sec
Tested: 1 x 10^-9 atm-cc/sec
Qualified: 2 x 10^-10 atm-cc/sec
Tested: 1 x 10^-9 atm-cc/sec
Qualified: 2 x 10^-10 atm-cc/sec
Tested: 1 x 10^-9 atm-cc/sec
Qualified: 2 x 10^-10 atm-cc/sec
Tested: 1 x 10^-9 atm-cc/sec

Max. operating temperature:
120 °C
120 °C
120 °C
120 °C
120 °C

Fitting size:
3/8" compression seal
1/4" gasket seal
1/2" gasket seal
1/4" compression seal
1/2" butt weld tube

Inlet/outlet:
Male/male
Male/male
Male/male
Male/male
-

Ø×L:
25×119 mm
28×127 mm
28×133 mm
25×115 mm
28×133 mm

Specifications

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