Wafer baskets

Supplier: ENTEGRIS

Wafer baskets

Supplier: ENTEGRIS

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About this item

These wafer baskets made of PFA are designed for processing and handling substrates. They are compatible with tanks and handles.

Compatible tanks:
A14 baskets: E12
A15 baskets: E12, E14-10-01, E22-101
A26 baskets: E14-25-01
A47 baskets: E14-21-01, E14-25-01

Compatible handles:
A14 baskets: A01, A07, A029
A15 baskets: A01, PA01, A07, PA07, A029, PA029
A26 baskets: A01, A07, A029
A47 baskets: A01, A07, A029

8 Options Available Below

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Product Details & Documents

These wafer baskets made of PFA are designed for processing and handling substrates. They are compatible with tanks and handles.

Compatible tanks:
A14 baskets: E12
A15 baskets: E12, E14-10-01, E22-101
A26 baskets: E14-25-01
A47 baskets: E14-21-01, E14-25-01

Compatible handles:
A14 baskets: A01, A07, A029
A15 baskets: A01, PA01, A07, PA07, A029, PA029
A26 baskets: A01, A07, A029
A47 baskets: A01, A07, A029

Product Family Options

Product Information

For
Ø ext.×H
Availability
Price
ENTEA12-01-0215
Wafer basket, A12
Wafer basket, A12
52 wafers (13 - 38 mm)
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1 * 4 items
1 * 4 items
ENTEA13-01-0215
Wafer basket, A13
Wafer basket, A13
52 wafers (13 - 28,58 mm)
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1 * 4 items
1 * 4 items
ENTEA14-01S-0215
Wafer basket, A14
Wafer basket, A14
24 wafers (15,88 - 31,8 mm)
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1 * 4 items
1 * 4 items
ENTEA15-01-0215
Wafer basket, A15
Wafer basket, A15
24 wafers (25 - 44,4 mm)
177×46 mm
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1 * 4 items
1 * 4 items
ENTEA23-0215
Wafer basket, A23
Wafer basket, A23
50 wafers (25 - 51 mm)
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1 * 4 items
1 * 4 items
ENTEA26-01-0215
Wafer basket, A26
Wafer basket, A26
30 wafers (15,88 - 51 mm)
152×61 mm
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1 * 4 items
1 * 4 items
ENTEA47-01-0215
Wafer basket, numbered pockets, A47
Wafer basket, numbered pockets, A47
30 wafers (38,1 - 57,2 mm)
160×51 mm
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1 * 4 items
1 * 4 items
ENTEA89-01-0215
Wafer basket, A89
Wafer basket, A89
52 wafers (13×30×64 mm)
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1 * 4 items
1 * 4 items