The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.
- Superior particulate filtration for ultrapure gas system filtration
- Housing assembly eliminates outgassing by minimising weld area
Filter element: patented, sintered nickel membrane; housing: electropolished F20 stainless steel
Applications: ultrapure gas lines, high temperature and dynamic pressure applications, new fab construction, inert and reactive gases.
Downstream cleanliness particles: Less than 0,03 particles/liter (<1 particle/0,028 m³) greater than 0,01 μm
Downstream cleanliness volatiles : Volatile outgassing of H₂O, O₂ and THC is below detectable limits (by RGA and FID at room temperature)
- Catalog No:
- ENTEWG3NSMSL2
- ENTEWG3NS5RR2
- Material:
- Nickel
- Nickel
- Max. differential pressure:
- Forward/reverse: 35
- Forward/reverse: 35
- Max. operating pressure:
- 207 bar @ 100 °C
- 207 bar @ 100 °C
- Leak rating:
- Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec - Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec
- Max. operating temperature:
- Inert gases: 400 °C at 35 bar
Corrosive and reactive gases 50 °C at 70 bar - Inert gases: 400 °C at 35 bar
Corrosive and reactive gases 50 °C at 70 bar
- Fitting size:
- 1/4" gasket seal
- 1/4" gasket seal
- Inlet/outlet:
- Male/male
- Male/male
- Ø×L:
- 19×50 mm
- 19×84 mm
: VWR Chemicals
: VWR Collection
: VWR Collection
: VWR Chemicals
: VWR Collection
: VWR Collection
: VWR Collection
: KIMBERLY CLARK