Supplier: ENTEGRIS

This gas filter gun is designed for point-of-use filtration of compressed gas.

Supplier: ENTEGRIS

Made of high purity PFA and PTFE (all wetted parts).

Supplier: ENTEGRIS

Interlocking tabs press on the center of the tray for secure contact between the tray and cover.

Supplier: ENTEGRIS

Nest between H 44 trays and/or covers.

Supplier: ENTEGRIS

Long lasting and reliable PFA nitrogen spray guns with 0,5 µm PTFE membrane for use in high purity and corrosive chemical applications.

Supplier: ENTEGRIS

Clip, One piece clip, STAT-PRO® 125, För: Tray on tray or cover on tray

Supplier: ENTEGRIS

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.

Supplier: ENTEGRIS

Nest between H 20 trays and/or covers.

Supplier: ENTEGRIS

Multiple film frame shippers provide a safe and effective way to ship and store up to 25 wafers, or singulated die, mounted to film frames. Special applications include shipping 'diced' or thinned GaAs or GaP wafers as well as storage or shipment of wafers mounted to film frame. Replaceable top cover cushion allows for reuse of shipper. Shippers available for 300 mm, 200 mm and 150 mm film frame applications.

Supplier: ENTEGRIS

H 22 Series
Conical pocket holds one wafer facedown contacting only the wafer’s edges.

Supplier: ENTEGRIS

The H 93 single wafer shipper is designed to securely retain the wafer and minimise particle generation. Stackable with multiple closures, each shipper holds one 300 mm wafer facedown contacting only the wafer’s edges.

Supplier: ENTEGRIS

For shipping and storage applications. Holds one wafer facedown contacting only the wafer's edges.

Supplier: ENTEGRIS

Available for 1,0"; 1,5"; 2,0" and 2,5" wafers. Large area on cover provides space for labelling.

Supplier: ENTEGRIS

Entegris offers a wide selection of H 20 series 2" square trays, covers and accessories to meet your changing needs. H 20 series trays are available in various pocket sizes and depths, with or without wash holes and tweezers slots. H 20 series products offer proven reliability for handling bare die, including:

Supplier: ENTEGRIS

Provide excellent security for masks and reticles with pellicles.

Supplier: ENTEGRIS

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Use them in gas panels and gas cabinets where ultrapure gas is required for wafer processing.

Supplier: ENTEGRIS

Kapton® wrap for 1/2” and 3/4” components, För: Cynergy Weld-in-Place

Supplier: ENTEGRIS

These cartridge filters are widely used in chemical, electronic and semiconductor industries for liquid and gas prefiltration applications. They retain contaminants by means of a multi-stage, graded density design.

Supplier: ENTEGRIS

These filters are compatible with high purity gases as well as general nitrogen and CDA applications. Available in Bronze and Silver performance levels, they are specifically designed for high flow and low delta pressure applications and provide ultimate process protection by removing contaminants that could affect process quality.

Supplier: ENTEGRIS

Made of PFA, DuPont 450.

Supplier: ENTEGRIS

O-ring free design, ¹/₂ or ¹/₄" orifice.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three-ported directional valve enables simplification of piping system design while minimising its footprint. All PFA wetted surfaces for ultrapure and corrosion resistant performance.

Supplier: ENTEGRIS

These are compact, all-metal filters that fit in place of standard ¹/₄", ³/₈" and ¹/₂" VCR® gaskets in gas distribution systems. They protect sensitive gas components, such as mass flow controllers, regulators and valves from particle damage in applications up to 400 °C.

Supplier: ENTEGRIS

High performance, disposable filters for low flow applications. These filters provide compatibility with a wide range of acids, bases and non flammable solvents at ambient temperatures.

Supplier: ENTEGRIS

ETFE, white. Durable forceps for substrate handling.

Supplier: ENTEGRIS

HDPE, triple layer.

Supplier: ENTEGRIS

These components are constructed of high purity PFA and PTFE materials for wetted parts and PVDF, PEEK™ and PTFE u-cup with Viton® energizer for non wetted parts.

Supplier: ENTEGRIS

Cover for round tank, in PFA

Supplier: ENTEGRIS

This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.

Supplier: ENTEGRIS

Two- or three-way diaphragm valves, ¹/₄" orifice, normally closed.