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"ENTEGRIS"

 
 

NOWPak® T420 PTFE Liner Bottle Systems

Supplier: ENTEGRIS

The NOWPak® liner-based bottle system is a leading containment and dispense system that helps ensure that chemicals are protected throughout the filling, shipping and dispensing operations. The system includes a container which consists of a flexible liner inside a rigid overpack, a package closure and a variety of dispense connector options.

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GateKeeper® GPU Media Gas Purifiers

Supplier: ENTEGRIS

Entegris GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of gas purification products that deliver unsurpassed value and performance.

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Process wafer carriers, 200 mm

Process wafer carriers, 200 mm

Supplier: ENTEGRIS

PFA, natural.

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Bare die/CSP detail

Bare die/CSP detail

Supplier: ENTEGRIS

Bare die/CSP tray detail, ChipSentry® (Black conductive polycarbonate)

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Gas purifiers, GateKeeper® GPU 300 4R

Gas purifiers, GateKeeper® GPU 300 4R

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

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Gas purifiers, GateKeeper® GPU 200 4R

Gas purifiers, GateKeeper® GPU 200 4R

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

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Multiple wafer shipping box for 125 mm (5") wafer handling, Ultrapak® series

Supplier: ENTEGRIS

Ultrapak® series multiple wafer shipping boxes are made of Ultrapure polypropylene materials that provide a clean shipping environment and assure low levels of condensable inorganics.

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Cartridge filters, Optimizer® DEV and DI

Supplier: ENTEGRIS

These point-of-use filters meet small to mid-volume photochemical filtration needs for positive developer and DI water applications. Both Optimizer® DEV filters (for developer applications) and Optimizer® DI filters (for DI water applications) require no pre-wetting, so the filters function immediately after installation. The design also limits the handling of hazardous chemicals during the installation and promotes a healthier workplace. Do not use either filter with aromatic hydrocarbons.

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Mask carriers, E-series

Mask carriers, E-series

Supplier: ENTEGRIS

These carriers are designed to hold masks or reticles during transport. Carriers and boxes purchased as an assembly.

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Planarcore® PVA Brush

Supplier: ENTEGRIS

Planarcore® PVA Brush is designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications.

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Forceps

Supplier: ENTEGRIS

PP, white. Straight forceps for substrate handling.

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Integral ferrule fittings, ebows, Galtek®

Supplier: ENTEGRIS

These integral ferrule fittings are made from PFA.

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Pneumatic valves, CG4 SG series

Pneumatic valves, CG4 SG series

Supplier: ENTEGRIS

CR4 pneumatic valves are specially designed to handle temperatures upto 160 °C. There is a option to add ¼" and ¹/₈" connections from Flaretek®. With no exposed metal hardware the valve is completely sealed and protected from harsh chemical environments.

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Integral ferrule fittings, nuts and caps, Galtek®

Supplier: ENTEGRIS

Galtek®, Cap, with hex 1/2", Length: 21,3 mm, For tubing ext.Ø: 1/16"

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Cartridge filters, Optimizer® D300 and D600

Supplier: ENTEGRIS

The point-of-use photochemical filters with superior contaminant retention and low hold-up volume performance in sub-10 to 180 nm technology nodes. Both Optimizer® D300 and D600 filters are geared to small-volume filtration of photoresists, resist dielectrics, and solvents. It requires no pre-wetting, so the filters function immediately after installation. Without the need for prewetting, they reduce the likelihood that microbubbles will form and avoid the problems associated with incomplete wetting and the mixing of incompatible chemicals.

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Single wafer shippers for wafer size 76,2 (3"), 86,2 (3,25") or 90 mm

Single wafer shippers for wafer size 76,2 (3"), 86,2 (3,25") or 90 mm

Supplier: ENTEGRIS

Conical pocket holds one wafer face down contacting only the wafer edges.

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