Supplier: ENTEGRIS

ETFE, white.

Supplier: ENTEGRIS

For masks or reticles with pellicles. Label for identication labels. Landing pads prevent tearing of pellicies.

Supplier: ENTEGRIS

Multipurpose trays for a wide range of uses.

Supplier: ENTEGRIS

Entegris GateKeeper® GPU gas purifiers were designed
to improve purity consistency, lifetime, and final purity in
microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of HX gas purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

Automated, FIMS compatible SB300 FOSB provides a clean, secure environment for valuable 300 mm wafers as they move through numerous handling and transport processes.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

The safe and convenient method of interfacing reusable FluoroPure® chemical containers with bulk delivery systems. The patented design is key coded to assure against unsafe chemical mixing while ensuring dedicated clean service. One connection provides dispensing, venting and level detection.

Supplier: ENTEGRIS

These carriers are designed to hold masks or reticles during transport. They can be used within diverse industries, such as semi-conductor data storage, chemical processing and fuel cell. The carriers can be combined with handles and/or shipping boxes (need to be ordered separately).

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

Stainless steel/PFA manifold for use with Optimizer® ST DEV and DI photochemical filters.

Supplier: ENTEGRIS

PFA, natural.

Supplier: ENTEGRIS

Ultrapak® series multiple wafer shipping boxes are made of Ultrapure polypropylene materials that provide a clean shipping environment and assure low levels of condensable inorganics.

Supplier: ENTEGRIS

Tray covers in various standard materials are shown below.

Supplier: ENTEGRIS

These cartridge filters provide small particle retention to ensure minimal particles remain on the water surface. High purity connections with no O-ring to avoid potential source of contamination ensuring downstream cleanliness.

Supplier: ENTEGRIS

PFA.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All PFA valve body and high purity fluoropolymer wetted components for use in high purity, highly corrosive chemical handling applications.

Supplier: ENTEGRIS

PFA cartridge filter housing is the compact design, space-saving, enabes hassle-free cartridge changeouts (for safety and cleanliness) and reduced exposure to chemicals. It consists of lock-in design which perfectly seats the cartridge in the filter housing.

Supplier: ENTEGRIS

These cartridge filters are constructed of PTFE pleated membranes with PP supports to provide durability and cleanliness for filtration of process fluids used in the electronics industry.

Supplier: ENTEGRIS

These point-of-use filters meet small to mid-volume photochemical filtration needs for positive developer and DI water applications. Both Optimizer® DEV filters (for developer applications) and Optimizer® DI filters (for DI water applications) require no pre-wetting, so the filters function immediately after installation. The design also limits the handling of hazardous chemicals during the installation and promotes a healthier workplace. Do not use either filter with aromatic hydrocarbons.

Supplier: ENTEGRIS

These standard 125 mm wafer carriers are designed for optimum performance in automated equipment.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

Supplier: ENTEGRIS

For A15 wafer basket

Supplier: ENTEGRIS

This high purity diversion valve minimises footprint chemical applications including CMP slurry.

Supplier: ENTEGRIS

These carriers are designed to hold masks or reticles during transport. Carriers and boxes purchased as an assembly.

Supplier: ENTEGRIS

Stainless steel manifold for use with Impact® Plus disposable filters.

Supplier: ENTEGRIS

These disposable filters have been optimised for use with the IntelliGen® photochemical dispense system to deliver excellent filtration and dispense characteristics.

Supplier: ENTEGRIS

Bare die/CSP tray detail, ChipSentry® (Black conductive polycarbonate)

Supplier: ENTEGRIS

This process cassette is molded from STAT-PRO® 3000 and durable enough to withstand temperatures up to 120 °C. This saves process time and reduces the number of products to manage for in-lab transport. The cassette has a high-profile, rigid design with dimensional stability for maximum protection. It also has four-point contact on the 'H' bar and track, for improved positioning. It is particularly suitable for use in equipment operations on process tools and automated materials handling systems.