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Single wafer shippers, for 5" (125 mm) wafer handling, H 22 series

Single wafer shippers, for 5" (125 mm) wafer handling, H 22 series

Supplier: ENTEGRIS

Conical pocket holds one wafer face down contacting only the edge of the wafer.

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Cartridge filters, Fluorogard® FP

Cartridge filters, Fluorogard® FP

Supplier: ENTEGRIS

These filters can be used in solvent based photochemicals without the need for prewetting steps.

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NPT fittings

Supplier: ENTEGRIS

Straight union, with hex 1 1/8", Hole Ø: 14,2 mm, Length: 41,1 mm, Width: 28,6 mm, Thread: FNPT size 1/2"

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Wafer carriers, for 2,5" and smaller wafer handling

Supplier: ENTEGRIS

2" wafer carriers, Pocket spacing: 4,76 mm, pocket flat: 1,02 mm, 25 wafers, Stat-Pro® 100, —

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Tube fittings, straight, Quikgrip®

Supplier: ENTEGRIS

These tube fittings are made from PFA.

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Disposable filters, Optimizer® D PR and D PR-L

Supplier: ENTEGRIS

These filters are designed for small to mid volume POU photochemical and solvent filtration needs. They can be used for the hydrophobic filtration of photoresists, thinners and solvents.

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Wafer carriers, for 100 mm (4") wafer handling, 72/182 and 190 series

Wafer carriers, for 100 mm (4") wafer handling, 72/182 and 190 series

Supplier: ENTEGRIS

These 100 mm wafer carriers are designed for optimum performance in automated operations or for processing LCDs and other small devices.

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Wafer storage boxes for 125 mm (5") wafer handling, E 89/E 93 series

Supplier: ENTEGRIS

Two snap latches, one swing pin latch or three swing pin latches. Pin and socket hinges.

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Adapter fittings, Cynergy®

Supplier: ENTEGRIS

Cynergy® Clamp-to-Flaretek® adapter. These adapters show standard Entegris® fitting port connections used in conjunction with Cynergy® clamp fittings.

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Cartridge filters, Savana® AT

Cartridge filters, Savana® AT

Supplier: ENTEGRIS

These cartridge filters are designed with all fluoropolymer construction to consistently remove particles from a wide range of acids, bases and other process chemicals.

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Cartridge and disposable filters, Intercept®

Cartridge and disposable filters, Intercept®

Supplier: ENTEGRIS

These filters provide superior filtration for critical dilute, aqueous and low neutral pH cleaning applications at advanced technology nodes. The clean, dual capture membrane improves process performance and reduces on-wafer defects. In addition to sieving particle capture which is always active, the non sieving retention mechanisms are also active and strongest in conditions where pH is <3 and no surfactant is present.

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Multiple wafer shippers

Supplier: ENTEGRIS

Ultrapak® series multiple wafer shipping boxes are made of Ultrapure polypropylene materials that provide a clean shipping environment and assure low levels of condensable inorganics.

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Cartridge filters, Panelgard® 1-2-3 UPE and PDP

Supplier: ENTEGRIS

These disposable point of use filters are well suited for small to mid-volume process fluid filteration needs.

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Multiple wafer shipping boxes for 100 mm (4") wafer handling, Ultrapak® series

Multiple wafer shipping boxes for 100 mm (4") wafer handling, Ultrapak® series

Supplier: ENTEGRIS

Ultrapak® series multiple wafer shipping boxes are made of Ultrapure polypropylene materials that provide a clean shipping environment and assure low levels of condensable inorganics.

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Galtek® Check Valves, ³/₄" Orifice, O-ring Free Design E

Supplier: ENTEGRIS

Corrosion-resistant Galtek® check valves reduce contamination potential in your high-purity chemical applications and provide clean delivery of sophisticated chemicals.

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Tubings, PFA

Supplier: ENTEGRIS

Made of PFA, 4100

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