InVue® NT6520 Integrated Flow Controllers
Supplier: ENTEGRIS
Certificates
About this item
Offers precise point-of-use chemical flow control and is designed for point-of-use blending and dispense applications requiring medium to high flow rates (2,5 to 40 L/min).
- Most accurate in bubble prone media vs. other commonly used technologies
- Integral pressure transducer for simultaneous dual output - flow and pressure
- Compact footprint for space savings and easy installation
- High repeatability for superior process control
The InVue Integrated Flow Controller, NT6520 (2,5 to 40 L/min) combines our differential pressure based flowmeter and leading-edge control valve technology to create a closed-loop flow controller ideal for: Critical dispense applications, Chemical spiking and blending, On-demand chemical mixing and Higher flow applications such as bulk delivery or tool liquid dispense.
Materials of construction:
Wetted parts: Body, valve diaphragms: PTFE
Sensor interface: CTFE or PFA
Primary O-ring: Perfrez® PXC Ultra
Nonwetted parts: Polypropylene, PVDF, Viton®, polyurethane, and nylon
Specifications
- Catalog No:
- ENTE6520T7F4B12KP7
- ENTE6520T8F6B12KP7
- ENTE6520T8F6B12AP7
- Max. pressure:
- 690 kPa
- 690 kPa
- 690 kPa
- Response time:
- <3 seconds
- <3 seconds
- <3 seconds
- Electrical connection:
- 24 VDC (±10%) @ 1,2 Å
- 24 VDC (±10%) @ 1,2 Å
- 24 VDC (±10%) @ 1,2 Å
- Enclosure rating:
- IP 64
- IP 64
- IP 64
- Input signal:
- 4 - 20 mA, 0 - 10 VDC, 0 - 5 VDC
- 4 - 20 mA, 0 - 10 VDC, 0 - 5 VDC
- 4 - 20 mA, 0 - 10 VDC, 0 - 5 VDC
- Max. operating temperature:
- 10...65 °C
- 10...65 °C
- 10...65 °C
- Repeatability:
- ±0,5% of full scale
- ±0,5% of full scale
- ±0,5% of full scale