Tools are designed to work together to clean recessed surfaces and microporous sub-surfaces without using hazardous solvents. When used in conjunction, they safely and quickly remove build-up on process equipment and reduce contamination levels. Choose from diamond, silicon carbide, or aluminum oxide ScrubPADS for initial scouring. Complete the cleaning process with hydrophilic polyurethane foam sponges, wipers, and swabs.

• Use ScrubPADS for initial scouring
• Complete cleaning process with foam sponges, wipers, and swabs

ScrubPADS are fully laundered grits that are permanently bonded and encapsulated to stable, fabric backing.

Foam sponges, wipers, and swabs complete the cleaning of surfaces, recessed surfaces, and microporous sub-surfaces. Abrasion-resistant products absorb contamination and moisture with low particle transfer. They enable most cleaning to be done using deionized water, reducing the amount of chemistry and wiping materials required. Static-dissipative properties allow for safe cleaning of static-sensitive assemblies.

Chamber cleaning products are also offered in three convenient kits: a starter kit, customer evaluation kit, and chamber cleaning kit. Customer Evaluation Kit 10810-950 has one sample of each product and offers a convenient opportunity for reviewing the benefits and features of these chamber cleaning products with your staff. Chamber cleaning kit 89068-844 combines samples of ScrubPADS and UltraSOLV® cleaning tools.

The fabric backing is then permanently laminated to the UltraSOLV® high-absorbency foam wiping material. Diamond ScrubPADS are the most aggressive pad for removing extremely hard, glass-like build-up, such as that from titanium nitride. Silicon carbide ScrubPADS are designed for hard-surface cleaning. Pads offer long-term abrasiveness for quick removal of metal and hard polymer build-up on aluminum, stainless steel, and ceramic surfaces such as those found in implant, CVD, epitaxy, and floatzone reactors and polishers. The result is a satin-polished surface when some minor abrasion of the surface is permissible. Aluminum oxide ScrubPADS are designed for delicate surface cleaning. Use to remove hardened build-up from easily scratched tool surfaces such as anodized aluminum, quartz, polymer, and even LEXAN®. Pads gently scour and polish, leaving these surfaces clean of build-up without scratches.