Traceable Standard for Resolution Calibration, Electron Microscopy Sciences

A precision, holographic pattern provides accurate calibration in the horizontal plane for very high resolution, nanometer-scale measurements.

Model 150-2DUTC: This traceable, Certified Standard is a select grade. Each standard is individually measured in comparison with a similar specimen calibrated at PTB. (PTB, Physikalisch-Technischen Bundesanstald, is the German counterpart of NIST). The uncertainty of single pitch value is typically ±1.4 nm (95% confidence interval). Multi-pitch measurements provide the usual square-root of N improvement in precision. Easy to use. The specimen is durable and it allows you can scan in contact mode, offering you faster calibration and measurements.

144 nm pitch, two-dimensional array. Accurate to ±1 nm. Refer to calibration certificate for actual pitch. Aluminum bumps on Silicon, 4×3 mm die. Bump height (about 90 nm) and width (about 75 nm) are not calibrated. For SEM, an independent analytical lab has tested this specimen in a FE-SEM (field emission scanning electron microscope). They found that the pattern was very uniform and the specimen was easy to image. No significant charging was observed in the voltage range 1 to 20 kV. The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas altered or contaminated by previous scans.

For calibrators only unmounted, 15 mm steel disk (for AFM), SEM pin stub, or any other type of SEM stub.

 : The Model 150-2D Calibration Reference specimen comes with a non-traceable, manufacturer’s certificate. These states the average period, based on batch measurements.