About this item
EMS offers a series of calibration standards with one and two dimension calibrated patterns. The standards come in two grid spacings – 300 nanometers and 700 nanometers. These standards are created utilizing holographic interference of a particular laser frequency. They are typically accurate to < 1% across the entire surface of the standard.
White area material: Tungsten.
Black area material: Tungsten, or other metal.
Materials: The calibration specimen consists of a silicon chip with a thin (100nm) thick polymer layer containing the pattern and a thin tungsten film over-coating the entire surface. The tungsten film varies from 20 to 60 nm in thicknenss, depending on the particular model. This structure has been proven under a wide varitey of beam conditions, from 30kV to sub 12 kV.
Dimensions: 300 or 700 nm nominal (exact dimension will be provided with sample). Measurements are made from leading edge to leading edge, etc. Width of individual bars and spaces is not calibrated.
Background
EMS MXS "CE" and "BE" series SEM magnification reference gratings and grids set new standards for sub-micron accuracy and ease-of-use. Designed to meet the requirements for a reasonable cost, accurate sub-micron reference standard, "CE" Series Reference Standards can be tailored to meet a variety of needs.
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