GateKeeper® GPU CO Media Gas Purifier
Catalog # ENTEGPUS3000FCR08R
Supplier: ENTEGRIS
Specifications
- Flow rate:500 slpm
- Material:Stainless steel
- Description:CO media gas purifier, GateKeeper® GPU 3000 CR
- Model:3000
- Gases purified:CO
- Leak rating:1×10-9 atm cc/sec
- Fitting size:1/2" gasket seal
- Filter:0,0015 μm
- Ø×L:101,6×777 mm
- Inlet/outlet:Male/male
- Max. operating temperature:65 °C
- Media:CO
- Weight:7,3 kg
- Pk:1
- Fitting material:316 stainless steel
Specifications
About this item
Entegris GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of CO gas purification products that deliver unsurpassed value and performance.
- Purity control below part-per-billion (ppb) levels
- Low pressure drop through the purifier
- Long lifetime - improves cost of ownership
- Uses ambient temperature purification - no heat or power required to operate
- Insensitive to orientation (horizontal/vertical)
Applications: Semiconductor, data storage, flat panel display, LED, solar.
Certifications: Manufactured in an ISO® 9001:2015 facility.