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GateKeeper® GPU CO Media Gas Purifier
Catalog # ENTEGPUS3000FCR08R
Supplier:  ENTEGRIS
GateKeeper® GPU CO Media Gas Purifier
Catalog # ENTEGPUS3000FCR08R
Supplier:  ENTEGRIS

Specifications

  • Flow rate:
    500 slpm
  • Material:
    Stainless steel
  • Description:
    CO media gas purifier, GateKeeper® GPU 3000 CR
  • Model:
    3000
  • Gases purified:
    CO
  • Leak rating:
    1×10-9 atm cc/sec
  • Fitting size:
    1/2" gasket seal
  • Filter:
    0,0015 μm
  • Ø×L:
    101,6×777 mm
  • Inlet/outlet:
    Male/male
  • Max. operating temperature:
    65 °C
  • Media:
    CO
  • Weight:
    7,3 kg
  • Pk:
    1
  • Fitting material:
    316 stainless steel

Specifications

About this item

Entegris GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of CO gas purification products that deliver unsurpassed value and performance.

  • Purity control below part-per-billion (ppb) levels
  • Low pressure drop through the purifier
  • Long lifetime - improves cost of ownership
  • Uses ambient temperature purification - no heat or power required to operate
  • Insensitive to orientation (horizontal/vertical)

Applications: Semiconductor, data storage, flat panel display, LED, solar.

Certifications: Manufactured in an ISO® 9001:2015 facility.