Inline gas filters, Wafergard® III NF Mini and Mini XL
: ENTEGRIS
The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.
- Superior particulate filtration for ultrapure gas system filtration
- Housing assembly eliminates outgassing by minimising weld area
- Eliminates outgassing, improves corrosion resistance and provides excellent chemical compatibility
Filter element: patented, sintered nickel membrane; housing: electropolished VAR 316L stainless steel.
Applications: ultrapure gas lines, high temperature and dynamic pressure applications, new fab construction, inert and reactive gases.
Downstream cleanliness: <0,03 particles/liter (<1 particle/0,028 m³) >0,01 μm.
- Catalog No:
- ENTEWG3NS2RR2
- ENTEWG3NS2RR4
- ENTEWG3NS1RR2
- Material:
- Nickel
- Nickel
- Nickel
- Max. differential pressure:
- Forward/reverse: 20
- Forward/reverse: 20
- Forward/reverse: 20
- Max. operating pressure:
- 165 bar @ 100 °C
- 165 bar @ 100 °C
- 165 bar @ 100 °C
- Leak rating:
- Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec - Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec - Qualified: 2 x 10-10 atm-cc/sec
Tested: 1 x 10-9 atm-cc/sec
- Max. operating temperature:
- Inert gases: 400 °C at 83 bar
Corrosive and reactive gases 50 °C at 165 bar - Inert gases: 400 °C at 83 bar
Corrosive and reactive gases 50 °C at 165 bar - Inert gases: 400 °C at 83 bar
Corrosive and reactive gases 50 °C at 165 bar
- Fitting size:
- 1/4" gasket seal
- 1/2" gasket seal
- 1/4" gasket seal
- Inlet/outlet:
- Male/male
- Male/male
- Male/male
- Ø×L:
- 28,5×127 mm
- 28,5×133 mm
- 28,5×84 mm
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