"ENTEGRIS"

Integral ferrule fittings, nuts and caps, Galtek®

Supplier: ENTEGRIS

Galtek®, Nut ferrule, with hex 11/16", Length: 17,8 mm, For tubing ext.Ø: 8 mm

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Single wafer shippers for wafer size 76,2 (3"), 86,2 (3,25") or 90 mm

Supplier: ENTEGRIS

Conical pocket holds one wafer face down contacting only the wafer edges.

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Pneumatically operated diaphragm valves, Integra®

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Allows continuous flow through parallel ports. When actuated, the sample port opens allowing fluid to flow out or in. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

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Cartridge filters, Impact® 2 V2

Supplier: ENTEGRIS

Superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents.

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Wafer Storage Boxes for 150 mm Wafer Handling, E 99, E 210 and HA 200 Series

Supplier: ENTEGRIS

E 99 Series

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Pneumatic valves, CG4 SG series

Supplier: ENTEGRIS

CR4 pneumatic valves are specially designed to handle temperatures upto 160 °C. There is a option to add ¼" and ¹/₈" connections from Flaretek®. With no exposed metal hardware the valve is completely sealed and protected from harsh chemical environments.

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Cartridge filters, Optimizer® D300 and D600

Supplier: ENTEGRIS

The point-of-use photochemical filters with superior contaminant retention and low hold-up volume performance in sub-10 to 180 nm technology nodes. Both Optimizer® D300 and D600 filters are geared to small-volume filtration of photoresists, resist dielectrics, and solvents. It requires no pre-wetting, so the filters function immediately after installation. Without the need for prewetting, they reduce the likelihood that microbubbles will form and avoid the problems associated with incomplete wetting and the mixing of incompatible chemicals.

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GateKeeper® HGU Heated Getter Purifiers

Supplier: ENTEGRIS

GateKeeper® Heated Getter Units (HGU) are ideal solutions for point-of-use purification where CH4 or N2 impurity removal is required. Gases purified include Ar, He, Xe, N2, and H2.

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Wafer baskets

Supplier: ENTEGRIS

These wafer baskets made of PFA are designed for processing and handling substrates. They are compatible with tanks and handles.

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Mask packages, H 92 series

Supplier: ENTEGRIS

Provides excellent security for masks or reticles with pellicles.

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Tube fittings, elbows, Quikgrip®

Supplier: ENTEGRIS

These tube fittings are made from PFA.

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GateKeeper® GPU 20M 12, 16R Gas Purifiers

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers are designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical.

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Cartridge filters, ProcessGard® PP

Supplier: ENTEGRIS

These cartridge filters are suited for acids, bases, process water, solvents, dyes and lacquers in flat panel display and chemical manufacturing.

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Wafer shipping system, horizontal, SmartStack®

Supplier: ENTEGRIS

SmartStack® horizontal wafer shipping system is designed to reduce wafer breakage, die bond corrosion and particle contamination. These shipping system is designed to utilize common secondary packaging across wafer sizes, and the result is reduction in the number of pacvkaging configurations and wafer packing process. With additional layer of protection it is easy to maintain wafer integrity during transport and shipping.