Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

Offers precise point-of-use chemical flow control and is designed for point-of-use blending and dispense applications requiring medium to high flow rates (2,5 to 40 L/min).

Supplier: ENTEGRIS

Entegris offers a wide selection of H 20 series 2" square trays, covers and accessories to meet your changing needs. H 20 series trays are available in various pocket sizes and depths, with or without wash holes and tweezers slots. H 20 series products offer proven reliability for handling bare die, including:

Supplier: ENTEGRIS

Smaller than most comparable valves, ¹/₄" CR4 series valves are ideal for handling wet etch and clean process chemicals. These durable valves can handle temperatures up to 160 °C at 276 kPa.

Supplier: ENTEGRIS

Savana® Lab Disc disposable filters have been specially designed for simple, quick and efficient filtration of liquids used in laboratory, pilot and small-scale applications.

Supplier: ENTEGRIS

These cartridge filters are widely used in chemical, electronic and semiconductor industries for liquid and gas prefiltration applications. They retain contaminants by means of a multi-stage, graded density design.

Supplier: ENTEGRIS

Provide excellent security for masks and reticles with pellicles.

Supplier: ENTEGRIS

These components are constructed of high purity PFA and PTFE materials for wetted parts and PVDF, PEEK™ and PTFE u-cup with Viton® energizer for non wetted parts.

Supplier: ENTEGRIS

This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.

Supplier: ENTEGRIS

Microgard UPE/UPX filters do not require prewetting with solvent-based photochemicals. All PE construction lowers metallic and ionic contamination that can leach from filters that are manufactured with materials such as PP and nylon.

Supplier: ENTEGRIS

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Use them in gas panels and gas cabinets where ultrapure gas is required for wafer processing.

Supplier: ENTEGRIS

O-ring free design, ¹/₂ or ¹/₄" orifice.

Supplier: ENTEGRIS

Flaretek®, 1/4" tube flaring mandrel

Supplier: ENTEGRIS

These are compact, all-metal filters that fit in place of standard ¹/₄", ³/₈" and ¹/₂" VCR® gaskets in gas distribution systems. They protect sensitive gas components, such as mass flow controllers, regulators and valves from particle damage in applications up to 400 °C.

Supplier: ENTEGRIS

Made of PFA, DuPont 450.

Supplier: ENTEGRIS

These filters are compatible with high purity gases as well as general nitrogen and CDA applications. Available in Bronze and Silver performance levels, they are specifically designed for high flow and low delta pressure applications and provide ultimate process protection by removing contaminants that could affect process quality.

Supplier: ENTEGRIS

ETFE, white. Durable forceps for substrate handling.

Supplier: ENTEGRIS

High performance, disposable filters for low flow applications. These filters provide compatibility with a wide range of acids, bases and non flammable solvents at ambient temperatures.

Supplier: ENTEGRIS

Wafer handling, Wafer storage boxes for 2,5" and smaller wafer handling, E 04 series, Polystyrene, Black

Supplier: ENTEGRIS

Wafer handling trays to safely transport and protect silicon wafers.

Supplier: ENTEGRIS

For shipping and storage applications. Holds one wafer face down contacting only the wafer's edges. Replaceable cushions securely retain the wafer to minimise particle generation. Single latch provides secure closure and easy opening.

Supplier: ENTEGRIS

These filter disc series can be used for simple, quick and efficient filtration of fluids used in laboratory, pilot and small scale applications.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Valve design allows ultrapure water to continuously bypass the diaphragm, eliminating water stagnation and bacteria formation in the valve. Manually adjustable, integral needle valve provides precise control of bypass flow.

Supplier: ENTEGRIS

Two- or three-way diaphragm valves, ¹/₄" orifice, normally closed.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three-ported directional valve enables simplification of piping system design while minimising its footprint. All PFA wetted surfaces for ultrapure and corrosion resistant performance.

Supplier: ENTEGRIS

Injection molded round tank, in PFA material.

Supplier: ENTEGRIS

Wafer handling trays to safely transport and protect silicon wafers.

Supplier: ENTEGRIS

Cover for round tank, in PFA