Cartridge filters, Fluorogard® FP
Supplier: ENTEGRIS
These filters can be used in solvent based photochemicals without the need for prewetting steps.
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Manually operated diaphragm valves, Integra®
Supplier: ENTEGRIS
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three and one-half complete turns fully opens or closes the valve for more precise control than a ¹/₄-turn valve. Slower actuation reduces water hammer affect on fluid stream. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosion chemical handling applications.
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Horizontal wafer shippers, 150 mm SmartStack®
Supplier: ENTEGRIS
Horizontal wafer shipper.
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Accessories for flow meters
Supplier: ENTEGRIS
Accessory for flow meters, Cable (1,83 m) with 8-pin mating for NT® Flowmeters (for electrical connector type D00 only)
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InVue® NT4400 Electronic Flowmeters
Supplier: ENTEGRIS
The InVue® NT4400 Electronic Flowmeter is designed for use in ultra high-purity applications in the semiconductor industry and is compatible with highly corrosive processes. The flowthrough design minimizes dead volume, reducing the possibility of process contamination. This instrument features PTFE and other high purity fluoropolymers for all wetted parts.
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Galtek® Check Valves, ³/₄" Orifice, O-ring Free Design E
Supplier: ENTEGRIS
Corrosion-resistant Galtek® check valves reduce contamination potential in your high-purity chemical applications and provide clean delivery of sophisticated chemicals.
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Thin wafer shipping box for 100 mm thin wafer products, Ultrapak® series
Supplier: ENTEGRIS
Clean and secure thin wafer transport. Dramatically enhanced performance for thin wafer products.
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Gas purifiers, GateKeeper® GPU 70 4R
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.
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Tube fittings, straight, Flaretek®
Supplier: ENTEGRIS
These tube fittings are made from PFA.
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Tube fittings, straight, FlareLock® II
Supplier: ENTEGRIS
These tube fittings are made from PFA.
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Integral ferrule fittings, straight, Galtek®
Supplier: ENTEGRIS
These integral ferrule fittings are made from PFA.
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Pneumatically operated diaphragm valves, Integra®
Supplier: ENTEGRIS
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.
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Cartridge filters, ProcessGard® CN
Supplier: ENTEGRIS
These cartridge filters are designed for the removal of particles and microorganisms from liquids and gases. Used in clarification and prefiltration applications, these pleated filters retain contaminants primarily on the surface of the filter media. Downstream filter performance is enhanced due to efficient particle and microorganism reduction.
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Quick Connect System Sentry® QCIII, ENTEGRIS
Supplier: ENTEGRIS
The Sentry® QCIII Quick Connect System is the safest and easiest method of connecting FluoroPure® chemical containers with typical bulk chemical delivery systems. This patented connection system is key coded and uses Entegris' industry leading Flaretek® seal for the main chemical dispense line and radial seals for the remaining three ports. This new system allows the connection to be made without realigning key codes. Subsequent ports have radial seals with FEP encapsulated o-rings. This chemical dispense system incorporates a ³/₄" chemical fill/dispense port, ½" vent port, ¼" connection verification port and optional ³/₄" recirculation port.
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Mask packages, H 68 series
Supplier: ENTEGRIS
For masks or reticles with pellicles. Label for identication labels. Landing pads prevent tearing of pellicies.
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GateKeeper® GPU 700 F Gas Purifier
Supplier: ENTEGRIS
Entegris GateKeeper® GPU gas purifiers were designed
to improve purity consistency, lifetime, and final purity in
microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of HX gas purification products that deliver unsurpassed value and performance.
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Full Pitch Front Opening Shipping Boxes (FOSBs), SB300
Supplier: ENTEGRIS
Automated, FIMS compatible SB300 FOSB provides a clean, secure environment for valuable 300 mm wafers as they move through numerous handling and transport processes.
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Gas purifiers, GateKeeper® GPU 35 4R
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.
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Gas purifiers, GateKeeper® GPU 80 4R
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.
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Gas purifiers, GateKeeper® GPU 500 4R
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.
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Integral ferrule fittings, tees, Galtek®
Supplier: ENTEGRIS
These integral ferrule fittings are made from PFA.
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Spring boxes
Supplier: ENTEGRIS
Spring boxes, Holds twelve trays and one cover or thirteen trays, Polypropylene, natural