Spray guns

Supplier: ENTEGRIS

Made of high purity PFA and PTFE (all wetted parts).

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Clips for 4" chip trays, H 44 Series

Supplier: ENTEGRIS

Interlocking tabs press on the center of the tray for secure contact between the tray and cover.

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Inline gas filters, Wafergard® II F Micro

Supplier: ENTEGRIS

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.

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Clips for 2" chip trays, H20 Series

Supplier: ENTEGRIS

Clip, One piece clip, For: Tray on tray or cover on tray

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Inserts for trays H 44 series

Supplier: ENTEGRIS

Nest between H 44 trays and/or covers.

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Single wafer shipping boxes, for 150 mm wafer handling, H 22 series

Supplier: ENTEGRIS

For shipping and storage applications.

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Nitrogen spray gun

Supplier: ENTEGRIS

Long lasting and reliable PFA nitrogen spray guns with 0,5 µm PTFE membrane for use in high purity and corrosive chemical applications.

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Accessories for nitrogen spray gun

Supplier: ENTEGRIS

Replacement filter, 0,5 µm PTFE membrane in PE housing, For: Nitrogen spray guns

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Single wafer shipping boxes for 200 mm wafer handling, H 93 series

Supplier: ENTEGRIS

For shipping and storage applications. Holds one wafer facedown contacting only the wafer's edges.

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Single wafer shippers, H 22 series

Supplier: ENTEGRIS

Available for 1,0"; 1,5"; 2,0" and 2,5" wafers. Large area on cover provides space for labelling.

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Single wafer shipper, for 300 mm wafer handling, H 93 series

Supplier: ENTEGRIS

The H 93 single wafer shipper is designed to securely retain the wafer and minimise particle generation. Stackable with multiple closures, each shipper holds one 300 mm wafer facedown contacting only the wafer’s edges.

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Gas filter gun, Wafergard® GN

Supplier: ENTEGRIS

This gas filter gun is designed for point-of-use filtration of compressed gas.

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Single wafer shippers, for 4" (100 mm) wafer handling, H 22/H 93 series

Supplier: ENTEGRIS

H 22 Series
Conical pocket holds one wafer facedown contacting only the wafer’s edges.

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Multiple film frame shippers

Supplier: ENTEGRIS

Multiple film frame shippers provide a safe and effective way to ship and store up to 25 wafers, or singulated die, mounted to film frames. Special applications include shipping 'diced' or thinned GaAs or GaP wafers as well as storage or shipment of wafers mounted to film frame. Replaceable top cover cushion allows for reuse of shipper. Shippers available for 300 mm, 200 mm and 150 mm film frame applications.

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Inserts for trays H 20 series

Supplier: ENTEGRIS

Nest between H 20 trays and/or covers.

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Wafer baskets

Supplier: ENTEGRIS

These wafer baskets made of PFA are designed for processing and handling substrates. They are compatible with tanks and handles.

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Tube fittings, elbows, FlareLock® II

Supplier: ENTEGRIS

These tube fittings are made from PFA.

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Integral ferrule fittings, ebows, Galtek®

Supplier: ENTEGRIS

These integral ferrule fittings are made from PFA.

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Tube fittings, elbows, Quikgrip®

Supplier: ENTEGRIS

These tube fittings are made from PFA.

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Handles for device carriers

Supplier: ENTEGRIS

Squeeze style handles.

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Cartridge filters, Impact® 2 V2

Supplier: ENTEGRIS

Superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents.

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Wafer Storage Boxes for 150 mm Wafer Handling, E 99, E 210 and HA 200 Series

Supplier: ENTEGRIS

E 99 Series

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Cartridge filters, Optimizer® D300 and D600

Supplier: ENTEGRIS

The point-of-use photochemical filters with superior contaminant retention and low hold-up volume performance in sub-10 to 180 nm technology nodes. Both Optimizer® D300 and D600 filters are geared to small-volume filtration of photoresists, resist dielectrics, and solvents. It requires no pre-wetting, so the filters function immediately after installation. Without the need for prewetting, they reduce the likelihood that microbubbles will form and avoid the problems associated with incomplete wetting and the mixing of incompatible chemicals.

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Integral ferrule fittings, nuts and caps, Galtek®

Supplier: ENTEGRIS

Galtek®, Nut ferrule, with hex 1/2", Length: 12,7 mm, For tubing ext.Ø: 1/16"

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Single wafer shippers for wafer size 76,2 (3"), 86,2 (3,25") or 90 mm

Supplier: ENTEGRIS

Conical pocket holds one wafer face down contacting only the wafer edges.

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Mask packages, H 92 series

Supplier: ENTEGRIS

Provides excellent security for masks or reticles with pellicles.

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Pneumatic valves, CG4 SG series

Supplier: ENTEGRIS

CR4 pneumatic valves are specially designed to handle temperatures upto 160 °C. There is a option to add ¼" and ¹/₈" connections from Flaretek®. With no exposed metal hardware the valve is completely sealed and protected from harsh chemical environments.

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Forceps

Supplier: ENTEGRIS

Glass-filled PP, white. Straight forceps for substrate handling.

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Wafer shipping system, horizontal, SmartStack®

Supplier: ENTEGRIS

SmartStack® horizontal wafer shipping system is designed to reduce wafer breakage, die bond corrosion and particle contamination. These shipping system is designed to utilize common secondary packaging across wafer sizes, and the result is reduction in the number of pacvkaging configurations and wafer packing process. With additional layer of protection it is easy to maintain wafer integrity during transport and shipping.