InVue® NT6520 Integrated Flow Controllers

Supplier: ENTEGRIS

Supplier: ENTEGRIS

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About this item

Offers precise point-of-use chemical flow control and is designed for point-of-use blending and dispense applications requiring medium to high flow rates (2,5 to 40 L/min).

Most accurate in bubble prone media vs. other commonly used technologies
Integral pressure transducer for simultaneous dual output - flow and pressure
Compact footprint for space savings and easy installation
High repeatability for superior process control

The InVue Integrated Flow Controller, NT6520 (2,5 to 40 L/min) combines our differential pressure based flowmeter and leading-edge control valve technology to create a closed-loop flow controller ideal for: Critical dispense applications, Chemical spiking and blending, On-demand chemical mixing and Higher flow applications such as bulk delivery or tool liquid dispense.

Materials of construction:
Wetted parts: Body, valve diaphragms: PTFE
Sensor interface: CTFE or PFA
Primary O-ring: Perfrez® PXC Ultra
Nonwetted parts: Polypropylene, PVDF, Viton®, polyurethane, and nylon

3 Options Available Below

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Product Details & Documents

Offers precise point-of-use chemical flow control and is designed for point-of-use blending and dispense applications requiring medium to high flow rates (2,5 to 40 L/min).

Most accurate in bubble prone media vs. other commonly used technologies
Integral pressure transducer for simultaneous dual output - flow and pressure
Compact footprint for space savings and easy installation
High repeatability for superior process control

Specifications for Product Family

Specifications

Catalog No:
ENTE6520T7F4B12KP7
ENTE6520T8F6B12AP7
ENTE6520T8F6B12KP7

Max. pressure:
690 kPa
690 kPa
690 kPa

Response time:
<3 seconds
<3 seconds
<3 seconds

Electrical connection:
24 VDC (±10%) @ 1,2 Å
24 VDC (±10%) @ 1,2 Å
24 VDC (±10%) @ 1,2 Å

Enclosure rating:
IP 64
IP 64
IP 64

Input signal:
4 - 20 mA, 0 - 10 VDC, 0 - 5 VDC
4 - 20 mA, 0 - 10 VDC, 0 - 5 VDC
4 - 20 mA, 0 - 10 VDC, 0 - 5 VDC

Max. operating temperature:
10...65 °C
10...65 °C
10...65 °C

Repeatability:
±0,5% of full scale
±0,5% of full scale
±0,5% of full scale

Specifications

Product Family Options

Product Information

Output
Availability
Price
ENTE6520T7F4B12KP7
InVue® integrated flow controller (IFC) NT6520, 12,7 mm Flaretek tubing fitting, 0 - 10 L/min flow range, FEP-jacketed 304,8 mm pigtail electrical cable, 4 - 20 mA, batch setpoint input signal, CTFE Sensor interface
InVue® integrated flow controller (IFC) NT6520, 12,7 mm Flaretek tubing fitting, 0 - 10 L/min flow range, FEP-jacketed 304,8 mm pigtail electrical cable, 4 - 20 mA, batch setpoint input signal, CTFE Sensor interface
Two 4 - 20 mA electrically isolated outputs, one for flow and one for pressure
Log in for availability
Log in for availability
1 * 1 pezzi
1 * 1 pezzi
Specifications:
More
Specifications
Cat. No.
ENTE6520T7F4B12KP7
Max. pressure
690 kPa
Response time
<3 seconds
Electrical connection
24 VDC (±10%) @ 1,2 Å
Enclosure rating
IP 64
Input signal
4 - 20 mA, 0 - 10 VDC, 0 - 5 VDC
Max. operating temperature
10...65 °C
Repeatability
±0,5% of full scale
ENTE6520T8F6B12AP7
InVue® integrated flow controller (IFC) NT6520, 19,05 mm Flaretek tubing fitting, 0 - 20 L/min flow range, FEP-jacketed 304,8 mm pigtail electrical cable, 4 - 20 mA, continuous setpoint input signal, CTFE Sensor interface
InVue® integrated flow controller (IFC) NT6520, 19,05 mm Flaretek tubing fitting, 0 - 20 L/min flow range, FEP-jacketed 304,8 mm pigtail electrical cable, 4 - 20 mA, continuous setpoint input signal, CTFE Sensor interface
Two 4 - 20 mA electrically isolated outputs, one for flow and one for pressure
Log in for availability
Log in for availability
1 * 1 pezzi
1 * 1 pezzi
Specifications:
More
Specifications
Cat. No.
ENTE6520T8F6B12AP7
Max. pressure
690 kPa
Response time
<3 seconds
Electrical connection
24 VDC (±10%) @ 1,2 Å
Enclosure rating
IP 64
Input signal
4 - 20 mA, 0 - 10 VDC, 0 - 5 VDC
Max. operating temperature
10...65 °C
Repeatability
±0,5% of full scale
ENTE6520T8F6B12KP7
InVue® integrated flow controller (IFC) NT6520, 19,05 mm Flaretek tubing fitting, 0 - 20 L/min flow range, FEP-jacketed 304,8 mm pigtail electrical cable, 4 - 20 mA, batch setpoint input signal, CTFE Sensor interface
InVue® integrated flow controller (IFC) NT6520, 19,05 mm Flaretek tubing fitting, 0 - 20 L/min flow range, FEP-jacketed 304,8 mm pigtail electrical cable, 4 - 20 mA, batch setpoint input signal, CTFE Sensor interface
Two 4 - 20 mA electrically isolated outputs, one for flow and one for pressure
Log in for availability
Log in for availability
1 * 1 pezzi
1 * 1 pezzi
Specifications:
More
Specifications
Cat. No.
ENTE6520T8F6B12KP7
Max. pressure
690 kPa
Response time
<3 seconds
Electrical connection
24 VDC (±10%) @ 1,2 Å
Enclosure rating
IP 64
Input signal
4 - 20 mA, 0 - 10 VDC, 0 - 5 VDC
Max. operating temperature
10...65 °C
Repeatability
±0,5% of full scale