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Pneumatically operated diaphragm valves, Integra®
Pneumatically operated diaphragm valves, Integra®
  ENTE202-86-01
 :  ENTEGRIS
Pneumatically operated diaphragm valves, Integra®
  ENTE202-86-01
 :  ENTEGRIS

 

  • Description:
    PVDF nut, port connection 3/8" Flaretek® flared tube
  • Environmentally Preferable:
  • Pk:
    1

 

 

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three-ported directional valve enables simplification of piping system design while minimising its footprint. All PFA wetted surfaces for ultrapure and corrosion resistant performance.

  • No external metal parts.
  • Unique top loading design provides for easy field service
  • Valve body design allows significant cavity drainage to minimize fluid entrapment
  • Integrally molded Flaretek® flared tube and PureBond® fusible pipe port connection options
  • Adding Espy® sensors allows for electronic monitoring of valve position

¹/₄" orifice, 3-way, position indication option.