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Sulphuric acid 96% ≥96% VLSI for microelectronic, J.T.Baker®
  5374-03
 :  Avantor
 :  
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Sulphuric acid 96% ≥96% VLSI for microelectronic, J.T.Baker®
  5374-03
 :  Avantor
 :  

 

  • Pk:
    9 lb
  • Seq:
    7089
  • Environmentally Preferable:

 

 

  • For Microelectronic Use:
    95.0 - 97.0 %
  • Recommended Storage Conditions: 15° - 100°F:
    = 10
  • Assay (H₂SO₄):
    95.0 - 97.0 %
  • Color (APHA):
    ≤10
  • Chloride (Cl):
    ≤0.1 ppm
  • Nitrate (NO₃):
    ≤0.2 ppm
  • Phosphate (PO₄):
    ≤0.3 ppm
  • Trace Impurities - Aluminum (Al):
    ≤50.0 ppb
  • Arsenic and Antimony (as As):
    ≤5.0 ppb
  • Trace Impurities - Barium (Ba):
    ≤50.0 ppb
  • Trace Impurities - Beryllium (Be):
    ≤10.0 ppb
  • Trace Impurities - Bismuth (Bi):
    ≤20.0 ppb
  • Trace Impurities - Boron (B):
    ≤10.0 ppb
  • Trace Impurities - Cadmium (Cd):
    ≤50 ppb
  • Trace Impurities - Calcium (Ca):
    ≤100.0 ppb
  • Trace Impurities - Chromium (Cr):
    ≤50 ppb
  • Trace Impurities - Cobalt (Co):
    ≤50.0 ppb
  • Trace Impurities - Copper (Cu):
    ≤10.0 ppb
  • Trace Impurities - Gallium (Ga):
    ≤20.0 ppb
  • Trace Impurities - Germanium (Ge):
    ≤100.0 ppb
  • Trace Impurities - Gold (Au):
    ≤40.0 ppb
  • Trace Impurities - Iron (Fe):
    ≤200.0 ppb
  • Trace Impurities - Lead (Pb):
    ≤20.0 ppb
  • Trace Impurities - Lithium (Li):
    ≤50.0 ppb
  • Trace Impurities - Magnesium (Mg):
    ≤50.0 ppb
  • Trace Impurities - Manganese (Mn):
    ≤10.0 ppb
  • Trace Impurities - Molybdenum (Mo):
    ≤10.0 ppb
  • Trace Impurities - Nickel (Ni):
    ≤50 ppb
  • Trace Impurities - Niobium (Nb):
    ≤10.0 ppb
  • Trace Impurities - Potassium (K):
    ≤100 ppb
  • Trace Impurities - Silicon (Si):
    ≤100.0 ppb
  • Trace Impurities - Silver (Ag):
    ≤50 ppb
  • Trace Impurities - Sodium (Na):
    ≤100.0 ppb
  • Trace Impurities - Strontium (Sr):
    ≤10.0 ppb
  • Trace Impurities - Tantalum (Ta):
    ≤10.0 ppb
  • Trace Impurities - Thallium (Tl):
    ≤20.0 ppb
  • Trace Impurities - Tin (Sn):
    ≤50 ppb
  • Trace Impurities - Titanium (Ti):
    ≤10.0 ppb
  • Trace Impurities - Vanadium (V):
    ≤10.0 ppb
  • Trace Impurities - Zinc (Zn):
    ≤50 ppb
  • Trace Impurities - Zirconium (Zr):
    ≤10.0 ppb
  • Particle Count - 0.5 µm and greater:
    ≤80 par/ml
  • Particle Count - 1.0 µm and greater:
    ≤10 par/ml

 

 

 :
 :98.08 g/mol
 :∼335 °C (1013 hPa)
 :231-639-5
 :1830
 :GHS05
 :Ambient
 :7664-93-9
 :H₂SO₄
 :MFCD00064589
 :10.38
 :1.84 g/cm³ (20 °C)
 :8 II