Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

Holds a wafer or a square plate.

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

These integral ferrule fittings are made from PFA.

Supplier: ENTEGRIS

Made of PFA, DuPont 440.

Supplier: ENTEGRIS

The Sentry® QCIII Quick Connect System is the safest and easiest method of connecting FluoroPure® chemical containers with typical bulk chemical delivery systems. This patented connection system is key coded and uses Entegris' industry leading Flaretek® seal for the main chemical dispense line and radial seals for the remaining three ports. This new system allows the connection to be made without realigning key codes. Subsequent ports have radial seals with FEP encapsulated o-rings. This chemical dispense system incorporates a ³/₄" chemical fill/dispense port, ½" vent port, ¼" connection verification port and optional ³/₄" recirculation port.

Supplier: ENTEGRIS

ETFE, white.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

Supplier: ENTEGRIS

These cartridge filters are designed for the removal of particles and microorganisms from liquids and gases. Used in clarification and prefiltration applications, these pleated filters retain contaminants primarily on the surface of the filter media. Downstream filter performance is enhanced due to efficient particle and microorganism reduction.

Supplier: ENTEGRIS

Multipurpose trays for a wide range of uses.

Supplier: ENTEGRIS

For masks or reticles with pellicles. Label for identication labels. Landing pads prevent tearing of pellicies.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

Automated, FIMS compatible SB300 FOSB provides a clean, secure environment for valuable 300 mm wafers as they move through numerous handling and transport processes.

Supplier: ENTEGRIS

Entegris GateKeeper® GPU gas purifiers were designed
to improve purity consistency, lifetime, and final purity in
microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of HX gas purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

Savana® PTFE disposable filters are constructed of PTFE pleated membranes with polypropylene supports and housing to provide fine durability and cleanliness for filtration of process fluids used in the electronics and various industries.

Supplier: ENTEGRIS

Entegris offers a wide selection of H 44 series 4" square trays, covers and accessories to meet your changing needs. H 20 series trays are available in various pocket sizes and depths, with or without wash holes and tweezers slots. H 44 series products offer proven reliability for handling bare die, including:

Supplier: ENTEGRIS

Wafergard® SG FG series gas filters provide superior particulate filtration to maximise photovoltaic cell and display manufacturing production yields.

Supplier: ENTEGRIS

Designed to divert one media stream into two directions, or alternate two media streams into one, minimizing the footprint. Handles temperatures up to 130 °C (266 °F).

Supplier: ENTEGRIS

These pipe fittings are made from PFA.

Supplier: ENTEGRIS

Made of PFA, DuPont 440.

Supplier: ENTEGRIS

PFA spray nozzles with NPT connections for use in applications needing chemical or DI water to be sprayed across a surface.

Supplier: ENTEGRIS

These point-of-use filters meet small to mid-volume photochemical filtration needs for positive developer and DI water applications. Both Optimizer® DEV filters (for developer applications) and Optimizer® DI filters (for DI water applications) require no pre-wetting, so the filters function immediately after installation. The design also limits the handling of hazardous chemicals during the installation and promotes a healthier workplace. Do not use either filter with aromatic hydrocarbons.

Supplier: ENTEGRIS

E 90 series

Supplier: ENTEGRIS

PFA, white.

Supplier: ENTEGRIS

Tray covers in various standard materials.

Supplier: ENTEGRIS

PVC, antistatic.

Supplier: ENTEGRIS

The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.

Supplier: ENTEGRIS

PUMPGARD™II filters protect chemicals and final filters against damage from broken silicone wafer pieces.