Supplier: ENTEGRIS

Available for 1,0"; 1,5"; 2,0" and 2,5" wafers. Large area on cover provides space for labelling.

Supplier: ENTEGRIS

This gas filter gun is designed for point-of-use filtration of compressed gas.

Supplier: ENTEGRIS

Made of high purity PFA and PTFE (all wetted parts).

Supplier: ENTEGRIS

Interlocking tabs press on the center of the tray for secure contact between the tray and cover.

Supplier: ENTEGRIS

Nest between H 44 trays and/or covers.

Supplier: ENTEGRIS

Long lasting and reliable PFA nitrogen spray guns with 0,5 µm PTFE membrane for use in high purity and corrosive chemical applications.

Supplier: ENTEGRIS

Clip, One piece clip, STAT-PRO® 125, For: Tray on tray or cover on tray

Supplier: ENTEGRIS

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.

Supplier: ENTEGRIS

The H 93 single wafer shipper is designed to securely retain the wafer and minimise particle generation. Stackable with multiple closures, each shipper holds one 300 mm wafer facedown contacting only the wafer’s edges.

Supplier: ENTEGRIS

For shipping and storage applications. Holds one wafer facedown contacting only the wafer's edges.

Supplier: ENTEGRIS

H 22 Series
Conical pocket holds one wafer facedown contacting only the wafer’s edges.

Supplier: ENTEGRIS

Nest between H 20 trays and/or covers.

Supplier: ENTEGRIS

Multiple film frame shippers provide a safe and effective way to ship and store up to 25 wafers, or singulated die, mounted to film frames. Special applications include shipping 'diced' or thinned GaAs or GaP wafers as well as storage or shipment of wafers mounted to film frame. Replaceable top cover cushion allows for reuse of shipper. Shippers available for 300 mm, 200 mm and 150 mm film frame applications.

Supplier: ENTEGRIS

Corrosion-resistant Galtek® check valves reduce contamination potential in your high-purity chemical applications and provide clean delivery of sophisticated chemicals.

Supplier: ENTEGRIS

High performance in a closed side wall configuration. Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today's advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers.

Supplier: ENTEGRIS

The InVue® NT4400 Electronic Flowmeter is designed for use in ultra high-purity applications in the semiconductor industry and is compatible with highly corrosive processes. The flowthrough design minimizes dead volume, reducing the possibility of process contamination. This instrument features PTFE and other high purity fluoropolymers for all wetted parts.

Supplier: ENTEGRIS

These filters are designed to consistantly remove particles from a whide range of acids, bases and other process materials. Ideal for medium to high flow applications, they deliver a low cost of ownership (COO) as a dry device or prewet product ready for quick installation. Prewet cartridges prevent alcohol-chemical interactions, avoid potential contamination sources and minimise process downtime.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

These tube fittings are made from PFA.

Supplier: ENTEGRIS

Cynergy® Clamp-to-Flaretek® adapter. These adapters show standard Entegris® fitting port connections used in conjunction with Cynergy® clamp fittings.

Supplier: ENTEGRIS

These 100 mm wafer carriers are designed for optimum performance in automated operations or for processing LCDs and other small devices.

Supplier: ENTEGRIS

Straight union, with hex 5/8", Hole Ø: 5,1 mm, Length: 35,6 mm, Width: - mm, Thread: MNPT size 1/4"×1/8"

Supplier: ENTEGRIS

Wafergard®, PU tubing with fitting, 2,1 m, For: Gas filter gun, Wafergard® GN

Supplier: ENTEGRIS

Wafershield™ high purity PP

Supplier: ENTEGRIS

This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.

Supplier: ENTEGRIS

Film frame shippers provide a convenient, safe and ergonomic means to ship and store wafers mounted on film frames. Film frame shippers are designed to protect the frame and to prevent any contact with the wafer surface.

Supplier: ENTEGRIS

These filters are designed for small to mid volume POU photochemical and solvent filtration needs. They can be used for the hydrophobic filtration of photoresists, thinners and solvents.

Supplier: ENTEGRIS

These filters can be used in solvent based photochemicals without the need for prewetting steps.

Supplier: ENTEGRIS

These disposable point of use filters are well suited for small to mid-volume process fluid filteration needs.

Supplier: ENTEGRIS

2,5" wafer carriers, Pocket spacing: 4,76 mm, pocket flat: 1,27 mm, 25 wafers, PFA, Natural