Supplier: ENTEGRIS

The H 93 single wafer shipper is designed to securely retain the wafer and minimise particle generation. Stackable with multiple closures, each shipper holds one 300 mm wafer facedown contacting only the wafer’s edges.

Supplier: ENTEGRIS

Nest between H 44 trays and/or covers.

Supplier: ENTEGRIS

Long lasting and reliable PFA nitrogen spray guns with 0,5 µm PTFE membrane for use in high purity and corrosive chemical applications.

Supplier: ENTEGRIS

This gas filter gun is designed for point-of-use filtration of compressed gas.

Supplier: ENTEGRIS

Available for 1,0"; 1,5"; 2,0" and 2,5" wafers. Large area on cover provides space for labelling.

Supplier: ENTEGRIS

Clip, Pair of clips, For: One tray and one cover

Supplier: ENTEGRIS

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.

Supplier: ENTEGRIS

Made of high purity PFA and PTFE (all wetted parts).

Supplier: ENTEGRIS

Interlocking tabs press on the center of the tray for secure contact between the tray and cover.

Supplier: ENTEGRIS

Nest between H 20 trays and/or covers.

Supplier: ENTEGRIS

Multiple film frame shippers provide a safe and effective way to ship and store up to 25 wafers, or singulated die, mounted to film frames. Special applications include shipping 'diced' or thinned GaAs or GaP wafers as well as storage or shipment of wafers mounted to film frame. Replaceable top cover cushion allows for reuse of shipper. Shippers available for 300 mm, 200 mm and 150 mm film frame applications.

Supplier: ENTEGRIS

H 22 Series
Conical pocket holds one wafer facedown contacting only the wafer’s edges.

Supplier: ENTEGRIS

For shipping and storage applications. Holds one wafer facedown contacting only the wafer's edges.

Supplier: ENTEGRIS

Entegris offers a wide selection of H 44 series 4" square trays, covers and accessories to meet your changing needs. H 20 series trays are available in various pocket sizes and depths, with or without wash holes and tweezers slots. H 44 series products offer proven reliability for handling bare die, including:

Supplier: ENTEGRIS

Wafergard® SG FG series gas filters provide superior particulate filtration to maximise photovoltaic cell and display manufacturing production yields.

Supplier: ENTEGRIS

Savana® PTFE disposable filters are constructed of PTFE pleated membranes with polypropylene supports and housing to provide fine durability and cleanliness for filtration of process fluids used in the electronics and various industries.

Supplier: ENTEGRIS

Wafer handling, Storage box with ID22, Stat-Pro® 100, —

Supplier: ENTEGRIS

Designed to divert one media stream into two directions, or alternate two media streams into one, minimizing the footprint. Handles temperatures up to 130 °C (266 °F).

Supplier: ENTEGRIS

Tray covers in various standard materials.

Supplier: ENTEGRIS

Photochemical filter with superior contaminant retention and low hold-up volume performance in sub-10 to 180 nm technology nodes.

Supplier: ENTEGRIS

These point-of-use filters meet small to mid-volume photochemical filtration needs for positive developer and DI water applications. Both Optimizer® DEV filters (for developer applications) and Optimizer® DI filters (for DI water applications) require no pre-wetting, so the filters function immediately after installation. The design also limits the handling of hazardous chemicals during the installation and promotes a healthier workplace. Do not use either filter with aromatic hydrocarbons.

Supplier: ENTEGRIS

These pipe fittings are made from PFA.

Supplier: ENTEGRIS

PUMPGARD™II filters protect chemicals and final filters against damage from broken silicone wafer pieces.

Supplier: ENTEGRIS

Made of PFA, DuPont 440.

Supplier: ENTEGRIS

PFA spray nozzles with NPT connections for use in applications needing chemical or DI water to be sprayed across a surface.

Supplier: ENTEGRIS

The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

Supplier: ENTEGRIS

The Spectra™ FOUP provides clean, secure wafer transport and optimum automation integration.