"ENTEGRIS"
Wafer storage boxes for 125 mm (5") wafer handling, E 89/E 93 series
Supplier: ENTEGRIS
Two snap latches, one swing pin latch or three swing pin latches. Pin and socket hinges.
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Adapter fittings, Cynergy®
Supplier: ENTEGRIS
Cynergy® Clamp-to-Flaretek® adapter. These adapters show standard Entegris® fitting port connections used in conjunction with Cynergy® clamp fittings.
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Cartridge filters, Savana® AT
Supplier: ENTEGRIS
These cartridge filters are designed with all fluoropolymer construction to consistently remove particles from a wide range of acids, bases and other process chemicals.
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Cartridge and disposable filters, Intercept®
Supplier: ENTEGRIS
These filters provide superior filtration for critical dilute, aqueous and low neutral pH cleaning applications at advanced technology nodes. The clean, dual capture membrane improves process performance and reduces on-wafer defects. In addition to sieving particle capture which is always active, the non sieving retention mechanisms are also active and strongest in conditions where pH is <3 and no surfactant is present.
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Multiple wafer shippers
Supplier: ENTEGRIS
Ultrapak® series multiple wafer shipping boxes are made of Ultrapure polypropylene materials that provide a clean shipping environment and assure low levels of condensable inorganics.
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Cartridge filters, Panelgard® 1-2-3 UPE and PDP
Supplier: ENTEGRIS
These disposable point of use filters are well suited for small to mid-volume process fluid filteration needs.
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Multiple wafer shipping boxes for 100 mm (4") wafer handling, Ultrapak® series
Supplier: ENTEGRIS
Ultrapak® series multiple wafer shipping boxes are made of Ultrapure polypropylene materials that provide a clean shipping environment and assure low levels of condensable inorganics.
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Galtek® Check Valves, ³/₄" Orifice, O-ring Free Design E
Supplier: ENTEGRIS
Corrosion-resistant Galtek® check valves reduce contamination potential in your high-purity chemical applications and provide clean delivery of sophisticated chemicals.
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Horizontal wafer shippers, 150 mm SmartStack®
Supplier: ENTEGRIS
Horizontal wafer shipper.
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Cartridge filters, Optimizer® PR 16 and PR 40
Supplier: ENTEGRIS
The UPE membrane of these filters eliminates pre-wetting, which optimises the full use of the membrane and ensures maximum flow.
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Gas purifiers, GateKeeper® GPU 70 4R
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.
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InVue® NT4400 Electronic Flowmeters
Supplier: ENTEGRIS
The InVue® NT4400 Electronic Flowmeter is designed for use in ultra high-purity applications in the semiconductor industry and is compatible with highly corrosive processes. The flowthrough design minimizes dead volume, reducing the possibility of process contamination. This instrument features PTFE and other high purity fluoropolymers for all wetted parts.
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Single film frame shippers
Supplier: ENTEGRIS
Film frame shippers provide a convenient, safe and ergonomic means to ship and store wafers mounted on film frames. Film frame shippers are designed to protect the frame and to prevent any contact with the wafer surface.
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GateKeeper® GPU SP70, SP300, SP600 Gas Purifiers
Supplier: ENTEGRIS
GateKeeper® GPU purifiers are the most complete and reliable solution for point-of-use (POU) gas purification.
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#: 20864.320
: VWR Chemicals
#: 83640.320
: VWR Chemicals
#: 31770.294
: VWR Chemicals
#: 83645.320
: VWR Chemicals