"ENTEGRIS"

Supplier: ENTEGRIS

This gas filter gun is designed for point-of-use filtration of compressed gas.

Supplier: ENTEGRIS

Available for 1,0"; 1,5"; 2,0" and 2,5" wafers. Large area on cover provides space for labelling.

Supplier: ENTEGRIS

Dipper basket used to clean or etch small pieces.

Supplier: ENTEGRIS

Interlocking tabs press on the center of the tray for secure contact between the tray and cover.

Supplier: ENTEGRIS

Made of high purity PFA and PTFE (all wetted parts).

Supplier: ENTEGRIS

H 22 Series
Conical pocket holds one wafer facedown contacting only the wafer’s edges.

Supplier: ENTEGRIS

Nest between H 20 trays and/or covers.

Supplier: ENTEGRIS

Nest between H 44 trays and/or covers.

Supplier: ENTEGRIS

Long lasting and reliable PFA nitrogen spray guns with 0,5 µm PTFE membrane for use in high purity and corrosive chemical applications.

Supplier: ENTEGRIS

Tray covers in various standard materials are shown below.

Supplier: ENTEGRIS

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.

Supplier: ENTEGRIS

Clip, Pair of clips, For: One tray and one cover

Supplier: ENTEGRIS

The H 93 single wafer shipper is designed to securely retain the wafer and minimise particle generation. Stackable with multiple closures, each shipper holds one 300 mm wafer facedown contacting only the wafer’s edges.

Supplier: ENTEGRIS

Plastic film frame rings provide a cost-effective and light weight alternative to expensive, heavy, metal frames to handle wafers during assembly operations and can be used to store and ship finished wafers.

Supplier: ENTEGRIS

These tube fittings are made from PVDF, PFA or CPFA.

Supplier: ENTEGRIS

These cartridge filters have superior retention efficiency with rapid particle removal and microbubble control which facilitates faster bath startup and system qualification.