"ENTEGRIS"
Single wafer shippers, for 5" (125 mm) wafer handling, H 22 series
Supplier: ENTEGRIS
Conical pocket holds one wafer face down contacting only the edge of the wafer.
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Integral ferrule fittings, ebows, Galtek®
Supplier: ENTEGRIS
These integral ferrule fittings are made from PFA.
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Pneumatic valves, CG4 SG series
Supplier: ENTEGRIS
CR4 pneumatic valves are specially designed to handle temperatures upto 160 °C. There is a option to add ¼" and ¹/₈" connections from Flaretek®. With no exposed metal hardware the valve is completely sealed and protected from harsh chemical environments.
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Integral ferrule fittings, nuts and caps, Galtek®
Supplier: ENTEGRIS
Galtek®, Cap, with hex 1/2", Length: 21,3 mm, For tubing ext.Ø: 1/16"
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Cartridge filters, Optimizer® D300 and D600
Supplier: ENTEGRIS
The point-of-use photochemical filters with superior contaminant retention and low hold-up volume performance in sub-10 to 180 nm technology nodes. Both Optimizer® D300 and D600 filters are geared to small-volume filtration of photoresists, resist dielectrics, and solvents. It requires no pre-wetting, so the filters function immediately after installation. Without the need for prewetting, they reduce the likelihood that microbubbles will form and avoid the problems associated with incomplete wetting and the mixing of incompatible chemicals.
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Single wafer shippers for wafer size 76,2 (3"), 86,2 (3,25") or 90 mm
Supplier: ENTEGRIS
Conical pocket holds one wafer face down contacting only the wafer edges.
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Tube fittings, elbows, FlareLock® II
Supplier: ENTEGRIS
These tube fittings are made from PFA.
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Cartridge filters, Impact® 2 V2
Supplier: ENTEGRIS
Superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents.
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Wafer baskets
Supplier: ENTEGRIS
These wafer baskets made of PFA are designed for processing and handling substrates. They are compatible with tanks and handles.
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Tube fittings, elbows, Quikgrip®
Supplier: ENTEGRIS
These tube fittings are made from PFA.
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Wafer Storage Boxes for 150 mm Wafer Handling, E 99, E 210 and HA 200 Series
Supplier: ENTEGRIS
E 99 Series
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Cartridge filters, ProcessGard® PP
Supplier: ENTEGRIS
These cartridge filters are suited for acids, bases, process water, solvents, dyes and lacquers in flat panel display and chemical manufacturing.
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Wafer carrier handles for 150 mm wafer handling
Supplier: ENTEGRIS
Squeeze style
Attaches to the notches on both end walls of carrier
Overall size: 163×140×183 mm
Compatible with all 'M' style carriers
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Forceps
Supplier: ENTEGRIS
Glass-filled PP, white. Straight forceps for substrate handling.
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Pneumatically operated diaphragm valves, Integra®
Supplier: ENTEGRIS
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Allows continuous flow through parallel ports. When actuated, the sample port opens allowing fluid to flow out or in. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.