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"ENTEGRIS"

 
 

Quick Connect System Sentry® QCII

Supplier: ENTEGRIS

The safe and convenient method of interfacing reusable FluoroPure® chemical containers with bulk delivery systems. The patented design is key coded to assure against unsafe chemical mixing while ensuring dedicated clean service. One connection provides dispensing, venting and level detection.

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Tube fittings, tees, Flaretek®

Supplier: ENTEGRIS

These tube fittings are made from PFA.

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Single wafer shipping boxes, for 150 mm wafer handling, H 22 series

Single wafer shipping boxes, for 150 mm wafer handling, H 22 series

Supplier: ENTEGRIS

For shipping and storage applications.

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Integra® Pneumatic Valves, 12,7 mm Orifice, 3-way

Supplier: ENTEGRIS

This high purity diversion valve minimises footprint chemical applications including CMP slurry.

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Covers for Wafer Baskets

Supplier: ENTEGRIS

For A14 wafer basket

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PFA housing heads and bowls, for cartridge filters, Chemlock®

PFA housing heads and bowls, for cartridge filters, Chemlock®

Supplier: ENTEGRIS

PFA cartridge filter housing is the compact design, space-saving, enabes hassle-free cartridge changeouts (for safety and cleanliness) and reduced exposure to chemicals. It consists of lock-in design which perfectly seats the cartridge in the filter housing.

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Inline gas filters, Wafergard® III NF Mini and Mini XL

Inline gas filters, Wafergard® III NF Mini and Mini XL

Supplier: ENTEGRIS

The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.

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Mask carriers, A 189 series

Supplier: ENTEGRIS

These carriers are designed to hold masks or reticles during transport. They can be used within diverse industries, such as semi-conductor data storage, chemical processing and fuel cell. The carriers can be combined with handles and/or shipping boxes (need to be ordered separately).

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Manually operated diaphragm valve, Integra®

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All PFA valve body and high purity fluoropolymer wetted components for use in high purity, highly corrosive chemical handling applications.

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Wafer carriers, for 125 mm (5") wafer handling,182 and 194 series

Wafer carriers, for 125 mm (5") wafer handling,182 and 194 series

Supplier: ENTEGRIS

These standard 125 mm wafer carriers are designed for optimum performance in automated equipment.

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Pneumatically operated diaphragm valves, Integra®

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

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Cartridge filters, Fluoroline™ S

Supplier: ENTEGRIS

These cartridge filters provide small particle retention to ensure minimal particles remain on the water surface. High purity connections with no O-ring to avoid potential source of contamination ensuring downstream cleanliness.

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Cartridge filters, Savana® PTFE

Cartridge filters, Savana® PTFE

Supplier: ENTEGRIS

These cartridge filters are constructed of PTFE pleated membranes with PP supports to provide durability and cleanliness for filtration of process fluids used in the electronics industry.

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Adapters, straight, PureBond®

Supplier: ENTEGRIS

PFA.

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Wafer carrier handles for 76,2 mm (3") wafer handling

Supplier: ENTEGRIS

Wafer carrier handles for 76,2 mm (3") wafer handling, Squeeze, A82M, PA82M wafer carriers, PFA, Natural

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NOWPak® T420 PTFE Liner Bottle Systems

Supplier: ENTEGRIS

The NOWPak® liner-based bottle system is a leading containment and dispense system that helps ensure that chemicals are protected throughout the filling, shipping and dispensing operations. The system includes a container which consists of a flexible liner inside a rigid overpack, a package closure and a variety of dispense connector options.

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