"ENTEGRIS"
Membrane disc filters, Optimizer®
Supplier: ENTEGRIS
These filter disc series can be used for simple, quick and efficient filtration of fluids used in laboratory, pilot and small scale applications.
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Manual Valves, CR4
Supplier: ENTEGRIS
Smaller than most comparable valves, ¹/₄" CR4 series valves are ideal for handling wet etch and clean process chemicals. These durable valves can handle temperatures up to 160 °C at 276 kPa.
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Galtek® solenoid operated diaphragm valves
Supplier: ENTEGRIS
Two- or three-way diaphragm valves, ¹/₄" orifice, normally closed.
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In-line gasket filters, Gasketgard®
Supplier: ENTEGRIS
These are compact, all-metal filters that fit in place of standard ¹/₄", ³/₈" and ¹/₂" VCR® gaskets in gas distribution systems. They protect sensitive gas components, such as mass flow controllers, regulators and valves from particle damage in applications up to 400 °C.
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Tank, rectangular, PFA
Supplier: ENTEGRIS
Injection molded rectangular tanks with dual capacity.
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Round process tank
Supplier: ENTEGRIS
Injection molded round tank, in PFA material.
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Savana® Semiconductor Lab Disc Disposable Filter
Supplier: ENTEGRIS
Savana® Lab Disc disposable filters have been specially designed for simple, quick and efficient filtration of liquids used in laboratory, pilot and small-scale applications.
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Pneumatically operated diaphragm valves, Integra®
Supplier: ENTEGRIS
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three-ported directional valve enables simplification of piping system design while minimising its footprint. All PFA wetted surfaces for ultrapure and corrosion resistant performance.
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Palladium Hydrogen Gas Purifiers
Supplier: ENTEGRIS
Pure Gas micro-channel palladium purifiers produce ultra-high-purity hydrogen (99,9999999%). All purifiers use patented micro-channel palladium membrane technology to remove all impurities to parts-per-trillion levels. The compact PS7-PD05 purifier is ideal for low flow rate university, laboratory, and industrial applications. The hydrogen purifier can be installed downstream of compressed cylinders or generators.
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Multiple film frame shippers
Supplier: ENTEGRIS
Multiple film frame shippers provide a safe and effective way to ship and store up to 25 wafers, or singulated die, mounted to film frames. Special applications include shipping 'diced' or thinned GaAs or GaP wafers as well as storage or shipment of wafers mounted to film frame. Replaceable top cover cushion allows for reuse of shipper. Shippers available for 300 mm, 200 mm and 150 mm film frame applications.
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Transport wafer carriers, 200 mm, 192/198 series
Supplier: ENTEGRIS
Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today’s advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers.
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Tubing cutters
Supplier: ENTEGRIS
These handheld tube cutters are easy to use and provide a clean, straight cut.
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Spring boxes
Supplier: ENTEGRIS
Spring boxes, Holds twelve trays and one cover or thirteen trays, Polypropylene, natural
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Integral ferrule fittings, tees, Galtek®
Supplier: ENTEGRIS
These integral ferrule fittings are made from PFA.
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Manually operated diaphragm valves, Integra®
Supplier: ENTEGRIS
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.