"ENTEGRIS"
Gas purifiers, GateKeeper® GPU 80 4R
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.
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Tube fittings, straight, FlareLock® II
Supplier: ENTEGRIS
These tube fittings are made from PFA.
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Pneumatically operated diaphragm valves, Integra®
Supplier: ENTEGRIS
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.
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Full Pitch Front Opening Shipping Boxes (FOSBs), SB300
Supplier: ENTEGRIS
Automated, FIMS compatible SB300 FOSB provides a clean, secure environment for valuable 300 mm wafers as they move through numerous handling and transport processes.
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Cartridge filters, ProcessGard® CN
Supplier: ENTEGRIS
These cartridge filters are designed for the removal of particles and microorganisms from liquids and gases. Used in clarification and prefiltration applications, these pleated filters retain contaminants primarily on the surface of the filter media. Downstream filter performance is enhanced due to efficient particle and microorganism reduction.
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GateKeeper® GPU 500 4R Gas Purifiers
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.
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Quick Connect System Sentry® QCIII, ENTEGRIS
Supplier: ENTEGRIS
The Sentry® QCIII Quick Connect System is the safest and easiest method of connecting FluoroPure® chemical containers with typical bulk chemical delivery systems. This patented connection system is key coded and uses Entegris' industry leading Flaretek® seal for the main chemical dispense line and radial seals for the remaining three ports. This new system allows the connection to be made without realigning key codes. Subsequent ports have radial seals with FEP encapsulated o-rings. This chemical dispense system incorporates a ³/₄" chemical fill/dispense port, ½" vent port, ¼" connection verification port and optional ³/₄" recirculation port.
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Mask packages, H 68 series
Supplier: ENTEGRIS
For masks or reticles with pellicles. Label for identication labels. Landing pads prevent tearing of pellicies.
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Integral ferrule fittings, nuts and caps, Galtek®
Supplier: ENTEGRIS
Galtek®, Nut ferrule, with hex 5/8", Length: 15,7 mm, For tubing ext.Ø: 6 mm
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Mask packages, H 92 series
Supplier: ENTEGRIS
Provides excellent security for masks or reticles with pellicles.
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Tube fittings, elbows, FlareLock® II
Supplier: ENTEGRIS
These tube fittings are made from PFA.
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Cartridge filters, Optimizer® D300 and D600
Supplier: ENTEGRIS
The point-of-use photochemical filters with superior contaminant retention and low hold-up volume performance in sub-10 to 180 nm technology nodes. Both Optimizer® D300 and D600 filters are geared to small-volume filtration of photoresists, resist dielectrics, and solvents. It requires no pre-wetting, so the filters function immediately after installation. Without the need for prewetting, they reduce the likelihood that microbubbles will form and avoid the problems associated with incomplete wetting and the mixing of incompatible chemicals.