"ENTEGRIS"
Inline gas filters, Wafergard® II F Micro
Supplier: ENTEGRIS
Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.
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Clips for 2" chip trays, H20 Series
Supplier: ENTEGRIS
Clip, Pair of clips, For: One tray and one cover
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Gas filter gun, Wafergard® GN
Supplier: ENTEGRIS
This gas filter gun is designed for point-of-use filtration of compressed gas.
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Clips for 4" chip trays, H 44 Series
Supplier: ENTEGRIS
Interlocking tabs press on the center of the tray for secure contact between the tray and cover.
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Spray guns
Supplier: ENTEGRIS
Made of high purity PFA and PTFE (all wetted parts).
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Single wafer shippers, for 4" (100 mm) wafer handling, H 22/H 93 series
Supplier: ENTEGRIS
H 22 Series
Conical pocket holds one wafer facedown contacting only the wafer’s edges.
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Inserts for trays H 20 series
Supplier: ENTEGRIS
Nest between H 20 trays and/or covers.
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Inserts for trays H 44 series
Supplier: ENTEGRIS
Nest between H 44 trays and/or covers.
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Nitrogen spray gun
Supplier: ENTEGRIS
Long lasting and reliable PFA nitrogen spray guns with 0,5 µm PTFE membrane for use in high purity and corrosive chemical applications.
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Covers for 4" chip trays, H44
Supplier: ENTEGRIS
Tray covers in various standard materials are shown below.
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Single wafer shipper, for 300 mm wafer handling, H 93 series
Supplier: ENTEGRIS
The H 93 single wafer shipper is designed to securely retain the wafer and minimise particle generation. Stackable with multiple closures, each shipper holds one 300 mm wafer facedown contacting only the wafer’s edges.
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Single wafer shippers, H 22 series
Supplier: ENTEGRIS
Available for 1,0"; 1,5"; 2,0" and 2,5" wafers. Large area on cover provides space for labelling.
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Dipper basket
Supplier: ENTEGRIS
Dipper basket used to clean or etch small pieces.
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Tube fittings, straight, Flaretek®
Supplier: ENTEGRIS
These tube fittings are made from PFA.
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Gas purifiers, GateKeeper® GPU 35 4R
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.
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Tube fittings, straight, FlareLock® II
Supplier: ENTEGRIS
These tube fittings are made from PFA.