Pneumatically operated diaphragm valves, Integra®

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Higher performance with greater back (outlet) pressure capability. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

• No external metal parts
• Unique top loading design allows for field service
• Piston shaft is encapsulated in PFA diaphragm to isolate it from corrosive fluids
• Unique body design allows for 100% cavity drainage to prevent entrapment of fluids
• Espy® sensors can be added to allow electronic monitoring of valve position and valve body seal integrity

¹/₄" orifice, 2-way, high pressure, leak detection and position indication options.