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GateKeeper® GPU Media Gas Purifiers

GateKeeper® GPU Media Gas Purifiers

Supplier:   ENTEGRIS
GateKeeper® GPU Media Gas Purifiers
Supplier:  ENTEGRIS
Certificates

9 Options Available Below

Product Details & Documents

Entegris GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of gas purification products that deliver unsurpassed value and performance.

  • Purity control below parts-per-billion (ppb) levels

  • Low pressure drop through the purifier
  • Long lifetime - improves cost of ownership
  • Uses ambient temperature purification - no heat or power required to operate
  • Insensitive to orientation (horizontal/vertical)

Applications: Semiconductor, data storage, flat panel display, LED, solar.

One year with an inlet challenge of 1 ppm moisture and 1 ppm oxygen with flow rates.

Break through indicator (BTI): Detects moisture downstream of a purifier and notifies that a replacement or regeneration is required.

Certifications: Manufactured in an ISO® 9001:2015 facility and CE certified to the Pressure Equipment Directive (PED), Designed in accordance with ASME®.

Delivery information: Additional options includes: additional valves and piping so the process gas can bypass around the purifier, Entegris offers 3 and 5
valve bypass assemblies for many of the standard, GPU Gas Purifiers (sold separately).

Specifications for Product Family

Specifications

  • Catalog No:
  • ENTEGPUS3000FCR08R
  • ENTEGPUS3000FEX08R
  • ENTEGPUS3000FEX082
  • ENTEGPUS3000FHX08R
  • ENTEGPUS3000FHX8.2
  • ENTEGPUS3000FIX08R
  • ENTEGPUS3000FIX082
  • ENTEGPUS3000FLG08R
  • ENTEGPUS3000FWX08R
  • Model:
  • 3000
  • 3000
  • 3000
  • 3000
  • 3000
  • 3000
  • 3000
  • 3000
  • 3000
  • Material:
  • Stainless steel
  • Stainless steel
  • Stainless steel
  • Stainless steel
  • Stainless steel
  • Stainless steel
  • Stainless steel
  • Stainless steel
  • Stainless steel
  • Gases purified:
  • CO
  • Outlet purity:
  • 100pptV
  • 100pptV
  • 100pptV
  • 100pptV
  • 100pptV
  • 100pptV
  • 100pptV
  • 100pptV
  • 100pptV
  • Media:
  • CR
  • EX
  • EX
  • HX
  • HX
  • IX
  • IX
  • LG
  • WX
  • Max. operating pressure:
  • 17,2 bar (250 psig)
  • 17,2 bar (250 psig)
  • 17,2 bar (250 psig)
  • 17,2 bar (250 psig)
  • 17,2 bar (250 psig)
  • 17,2 bar (250 psig)
  • 17,2 bar (250 psig)
  • 17,2 bar (250 psig)
  • 17,2 bar (250 psig)
  • Leak rating:
  • 1×10⁻⁹ atm cc/s of He
  • 1×10⁻⁹ atm cc/s of He
  • 1×10⁻⁹ atm cc/s of He
  • 1×10⁻⁹ atm cc/s of He
  • 1×10⁻⁹ atm cc/s of He
  • 1×10⁻⁹ atm cc/s of He
  • 1×10⁻⁹ atm cc/s of He
  • 1×10⁻⁹ atm cc/s of He
  • 1×10⁻⁹ atm cc/s of He
  • Max. operating temperature:
  • 65 °C
  • 65 °C
  • 65 °C
  • 65 °C
  • 65 °C
  • 65 °C
  • 65 °C
  • 65 °C
  • 65 °C
  • Max. flow rate:
  • 500 slpm
  • 500 slpm
  • 500 slpm
  • 500 slpm
  • 500 slpm
  • 500 slpm
  • 500 slpm
  • 500 slpm
  • 500 slpm
  • Pressure drop:
  • 0,38 bar (5,6 psid)
  • 0,38 bar (5,6 psid)
  • 0,38 bar (5,6 psid)
  • 0,38 bar (5,6 psid)
  • 0,38 bar (5,6 psid)
  • 0,38 bar (5,6 psid)
  • 0,38 bar (5,6 psid)
  • 0,38 bar (5,6 psid)
  • 0,38 bar (5,6 psid)
  • Fitting size:
  • 12,7 mm
  • 12,7 mm
  • 12,7 mm
  • 12,7 mm
  • 12,7 mm
  • 12,7 mm
  • 12,7 mm
  • 12,7 mm
  • 12,7 mm
  • Inlet/outlet:
  • Male/male
  • Male/male
  • Female/female
  • Male/male
  • Female/female
  • Male/male
  • Female/female
  • Male/male
  • Male/male
  • Filter:
  • 0,0015 μm
  • 0,0015 μm
  • 0,0015 μm
  • 0,0015 μm
  • 0,0015 μm
  • 0,0015 μm
  • 0,0015 μm
  • 0,0015 μm
  • 0,0015 μm
  • Ø×L:
  • 101,6×508 mm
  • 101,6×508 mm
  • 101.6×777 mm
  • 101,6×508 mm
  • 101.6×777 mm
  • 101,6×508 mm
  • 101.6×777 mm
  • 101,6×508 mm
  • 101,6×508 mm
  • Weight:
  • 7,3 kg
  • 7,3 kg
  • 8,5 kg
  • 7,3 kg
  • 8,5 kg
  • 7,3 kg
  • 8,5 kg
  • 7,3 kg
  • 7,3 kg

Specifications

Product Family Options

Product Information

  • Fitting material
    Availability
    Price
  • ENTEGPUS3000FCR08R
    GateKeeper® GPU 3000 CR media gas purifier
    GateKeeper® GPU 3000 CR media gas purifier
    316 stainless steel
    Log in for availability
    Log in for availability
    1 * 1 items
    1 * 1 items
    Specifications:
    More
    Specifications
    Cat. No.
    ENTEGPUS3000FCR08R
    Model
    3000
    Material
    Stainless steel
    Gases purified
    CO
    Outlet purity
    100pptV
    Media
    CR
    Max. operating pressure
    17,2 bar (250 psig)
    Leak rating
    1×10⁻⁹ atm cc/s of He
    Max. operating temperature
    65 °C
    Max. flow rate
    500 slpm
    Pressure drop
    0,38 bar (5,6 psid)
    Fitting size
    12,7 mm
    Inlet/outlet
    Male/male
    Filter
    0,0015 μm
    Ø×L
    101,6×508 mm
    Weight
    7,3 kg
  • ENTEGPUS3000FEX08R
    GateKeeper® GPU 3000 EX media gas purifier
    GateKeeper® GPU 3000 EX media gas purifier
    316 stainless steel
    Log in for availability
    Log in for availability
    1 * 1 items
    1 * 1 items
    Specifications:
    More
    Specifications
    Cat. No.
    ENTEGPUS3000FEX08R
    Model
    3000
    Material
    Stainless steel
    Gases purified
    Outlet purity
    100pptV
    Media
    EX
    Max. operating pressure
    17,2 bar (250 psig)
    Leak rating
    1×10⁻⁹ atm cc/s of He
    Max. operating temperature
    65 °C
    Max. flow rate
    500 slpm
    Pressure drop
    0,38 bar (5,6 psid)
    Fitting size
    12,7 mm
    Inlet/outlet
    Male/male
    Filter
    0,0015 μm
    Ø×L
    101,6×508 mm
    Weight
    7,3 kg
  • ENTEGPUS3000FEX082
    GateKeeper® GPU 3000 EX media gas purifier, isolation valve
    GateKeeper® GPU 3000 EX media gas purifier, isolation valve
    316 stainless steel
    Log in for availability
    Log in for availability
    1 * 1 items
    1 * 1 items
    Specifications:
    More
    Specifications
    Cat. No.
    ENTEGPUS3000FEX082
    Model
    3000
    Material
    Stainless steel
    Gases purified
    Outlet purity
    100pptV
    Media
    EX
    Max. operating pressure
    17,2 bar (250 psig)
    Leak rating
    1×10⁻⁹ atm cc/s of He
    Max. operating temperature
    65 °C
    Max. flow rate
    500 slpm
    Pressure drop
    0,38 bar (5,6 psid)
    Fitting size
    12,7 mm
    Inlet/outlet
    Female/female
    Filter
    0,0015 μm
    Ø×L
    101.6×777 mm
    Weight
    8,5 kg
  • ENTEGPUS3000FHX08R
    GateKeeper® GPU 3000 HX media gas purifier
    GateKeeper® GPU 3000 HX media gas purifier
    316 stainless steel
    Log in for availability
    Log in for availability
    1 * 1 items
    1 * 1 items
    Specifications:
    More
    Specifications
    Cat. No.
    ENTEGPUS3000FHX08R
    Model
    3000
    Material
    Stainless steel
    Gases purified
    Outlet purity
    100pptV
    Media
    HX
    Max. operating pressure
    17,2 bar (250 psig)
    Leak rating
    1×10⁻⁹ atm cc/s of He
    Max. operating temperature
    65 °C
    Max. flow rate
    500 slpm
    Pressure drop
    0,38 bar (5,6 psid)
    Fitting size
    12,7 mm
    Inlet/outlet
    Male/male
    Filter
    0,0015 μm
    Ø×L
    101,6×508 mm
    Weight
    7,3 kg
  • ENTEGPUS3000FHX8.2
    GateKeeper® GPU 3000 HX media gas purifier, isolation valve
    GateKeeper® GPU 3000 HX media gas purifier, isolation valve
    316 stainless steel
    Log in for availability
    Log in for availability
    1 * 1 items
    1 * 1 items
    Specifications:
    New Product
    More
    Specifications
    Cat. No.
    ENTEGPUS3000FHX8.2
    Model
    3000
    Material
    Stainless steel
    Gases purified
    Outlet purity
    100pptV
    Media
    HX
    Max. operating pressure
    17,2 bar (250 psig)
    Leak rating
    1×10⁻⁹ atm cc/s of He
    Max. operating temperature
    65 °C
    Max. flow rate
    500 slpm
    Pressure drop
    0,38 bar (5,6 psid)
    Fitting size
    12,7 mm
    Inlet/outlet
    Female/female
    Filter
    0,0015 μm
    Ø×L
    101.6×777 mm
    Weight
    8,5 kg
    New Product
  • ENTEGPUS3000FIX08R
    GateKeeper® GPU 3000 IX media gas purifier
    GateKeeper® GPU 3000 IX media gas purifier
    316 stainless steel
    Log in for availability
    Log in for availability
    1 * 1 items
    1 * 1 items
    Specifications:
    More
    Specifications
    Cat. No.
    ENTEGPUS3000FIX08R
    Model
    3000
    Material
    Stainless steel
    Gases purified
    Outlet purity
    100pptV
    Media
    IX
    Max. operating pressure
    17,2 bar (250 psig)
    Leak rating
    1×10⁻⁹ atm cc/s of He
    Max. operating temperature
    65 °C
    Max. flow rate
    500 slpm
    Pressure drop
    0,38 bar (5,6 psid)
    Fitting size
    12,7 mm
    Inlet/outlet
    Male/male
    Filter
    0,0015 μm
    Ø×L
    101,6×508 mm
    Weight
    7,3 kg
  • ENTEGPUS3000FIX082
    GateKeeper® GPU 3000 IX media gas purifier, isolation valve
    GateKeeper® GPU 3000 IX media gas purifier, isolation valve
    316 stainless steel
    Log in for availability
    Log in for availability
    1 * 1 items
    1 * 1 items
    Specifications:
    More
    Specifications
    Cat. No.
    ENTEGPUS3000FIX082
    Model
    3000
    Material
    Stainless steel
    Gases purified
    Outlet purity
    100pptV
    Media
    IX
    Max. operating pressure
    17,2 bar (250 psig)
    Leak rating
    1×10⁻⁹ atm cc/s of He
    Max. operating temperature
    65 °C
    Max. flow rate
    500 slpm
    Pressure drop
    0,38 bar (5,6 psid)
    Fitting size
    12,7 mm
    Inlet/outlet
    Female/female
    Filter
    0,0015 μm
    Ø×L
    101.6×777 mm
    Weight
    8,5 kg
  • ENTEGPUS3000FLG08R
    GateKeeper® GPU 3000 LG media gas purifier
    GateKeeper® GPU 3000 LG media gas purifier
    316 stainless steel
    Log in for availability
    Log in for availability
    1 * 1 items
    1 * 1 items
    Specifications:
    More
    Specifications
    Cat. No.
    ENTEGPUS3000FLG08R
    Model
    3000
    Material
    Stainless steel
    Gases purified
    Outlet purity
    100pptV
    Media
    LG
    Max. operating pressure
    17,2 bar (250 psig)
    Leak rating
    1×10⁻⁹ atm cc/s of He
    Max. operating temperature
    65 °C
    Max. flow rate
    500 slpm
    Pressure drop
    0,38 bar (5,6 psid)
    Fitting size
    12,7 mm
    Inlet/outlet
    Male/male
    Filter
    0,0015 μm
    Ø×L
    101,6×508 mm
    Weight
    7,3 kg
  • ENTEGPUS3000FWX08R
    GateKeeper® GPU 3000 WX media gas purifier
    GateKeeper® GPU 3000 WX media gas purifier
    316 stainless steel
    Log in for availability
    Log in for availability
    1 * 1 items
    1 * 1 items
    Specifications:
    New Product
    More
    Specifications
    Cat. No.
    ENTEGPUS3000FWX08R
    Model
    3000
    Material
    Stainless steel
    Gases purified
    Outlet purity
    100pptV
    Media
    WX
    Max. operating pressure
    17,2 bar (250 psig)
    Leak rating
    1×10⁻⁹ atm cc/s of He
    Max. operating temperature
    65 °C
    Max. flow rate
    500 slpm
    Pressure drop
    0,38 bar (5,6 psid)
    Fitting size
    12,7 mm
    Inlet/outlet
    Male/male
    Filter
    0,0015 μm
    Ø×L
    101,6×508 mm
    Weight
    7,3 kg
    New Product