Wafer carriers, for 125 mm (5") wafer handling,182 and 194 series
Catalog # 216-1694
Supplier: ENTEGRIS
Specifications
- For:E 89/E 93 series boxes
- Colour:Blue
- Description:Solid, with flanges, with "H" bar end flanges
- Material:PP
- Seq:08
- W×D×H:143×152×146 mm
- Compartment size:4,76 mm
- Pk:4
Specifications
About this item
These standard 125 mm wafer carriers are designed for optimum performance in automated equipment.
182 Series
Open sidewall style with wraparound wash slots
'H' bar equipment interface
26th slot for identification tag
Capacity: 25
D1 dimension: 14,53 mm
Pocket spacing: 4,76 mm
Pocket flat: 1,52 mm
194 Series
Open sidewall style
'H' bar equipment interface
Locating track notches at the center of the 13th pocket
Pins and holes on the top rail
Capacity: 25
D1 dimension: 14,53 mm
Pocket spacing: 4,76 mm
Pocket flat: 1,52 mm
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