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Inline gas filters, Wafergard® II F Micro

Inline gas filters, Wafergard® II F Micro

Supplier: ENTEGRIS

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.

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Clips for 2" chip trays, H20 Series

Clips for 2" chip trays, H20 Series

Supplier: ENTEGRIS

Clip, Pair of clips, For: One tray and one cover

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Gas filter gun, Wafergard® GN

Gas filter gun, Wafergard® GN

Supplier: ENTEGRIS

This gas filter gun is designed for point-of-use filtration of compressed gas.

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Single wafer shippers, H 22 series

Single wafer shippers, H 22 series

Supplier: ENTEGRIS

Available for 1,0"; 1,5"; 2,0" and 2,5" wafers. Large area on cover provides space for labelling.

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Dipper basket

Dipper basket

Supplier: ENTEGRIS

Dipper basket used to clean or etch small pieces.

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Clips for 4" chip trays, H 44 Series

Clips for 4" chip trays, H 44 Series

Supplier: ENTEGRIS

Interlocking tabs press on the center of the tray for secure contact between the tray and cover.

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Spray guns

Supplier: ENTEGRIS

Made of high purity PFA and PTFE (all wetted parts).

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Covers for 4" chip trays, H44

Covers for 4" chip trays, H44

Supplier: ENTEGRIS

Tray covers in various standard materials are shown below.

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Inserts for trays H 44 series

Supplier: ENTEGRIS

Nest between H 44 trays and/or covers.

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Nitrogen spray gun

Nitrogen spray gun

Supplier: ENTEGRIS

Long lasting and reliable PFA nitrogen spray guns with 0,5 µm PTFE membrane for use in high purity and corrosive chemical applications.

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Single wafer shippers, for 4" (100 mm) wafer handling, H 22/H 93 series

Single wafer shippers, for 4" (100 mm) wafer handling, H 22/H 93 series

Supplier: ENTEGRIS

H 22 Series
Conical pocket holds one wafer facedown contacting only the wafer’s edges.

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Inserts for trays H 20 series

Supplier: ENTEGRIS

Nest between H 20 trays and/or covers.

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Single wafer shipper, for 300 mm wafer handling, H 93 series

Single wafer shipper, for 300 mm wafer handling, H 93 series

Supplier: ENTEGRIS

The H 93 single wafer shipper is designed to securely retain the wafer and minimise particle generation. Stackable with multiple closures, each shipper holds one 300 mm wafer facedown contacting only the wafer’s edges.

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Tube fittings, straight, Flaretek®

Supplier: ENTEGRIS

These tube fittings are made from PFA.

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Gas purifiers, GateKeeper® GPU 35 4R

Gas purifiers, GateKeeper® GPU 35 4R

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.

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Tube fittings, straight, FlareLock® II

Supplier: ENTEGRIS

These tube fittings are made from PFA.

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