"ENTEGRIS"
Single wafer shippers, H 22 series
Supplier: ENTEGRIS
Available for 1,0"; 1,5"; 2,0" and 2,5" wafers. Large area on cover provides space for labelling.
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Clips for 2" chip trays, H20 Series
Supplier: ENTEGRIS
Clip, One piece clip, STAT-PRO® 125, For: Tray on tray or cover on tray
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Inline gas filters, Wafergard® II F Micro
Supplier: ENTEGRIS
Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.
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Clips for 4" chip trays, H 44 Series
Supplier: ENTEGRIS
Interlocking tabs press on the center of the tray for secure contact between the tray and cover.
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Single wafer shippers, for 4" (100 mm) wafer handling, H 22/H 93 series
Supplier: ENTEGRIS
H 22 Series
Conical pocket holds one wafer facedown contacting only the wafer’s edges.
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Inserts for trays H 20 series
Supplier: ENTEGRIS
Nest between H 20 trays and/or covers.
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Covers for 4" chip trays, H44
Supplier: ENTEGRIS
Tray covers in various standard materials are shown below.
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Inserts for trays H 44 series
Supplier: ENTEGRIS
Nest between H 44 trays and/or covers.
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Nitrogen spray gun
Supplier: ENTEGRIS
Long lasting and reliable PFA nitrogen spray guns with 0,5 µm PTFE membrane for use in high purity and corrosive chemical applications.
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Gas filter gun, Wafergard® GN
Supplier: ENTEGRIS
This gas filter gun is designed for point-of-use filtration of compressed gas.
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Single wafer shipper, for 300 mm wafer handling, H 93 series
Supplier: ENTEGRIS
The H 93 single wafer shipper is designed to securely retain the wafer and minimise particle generation. Stackable with multiple closures, each shipper holds one 300 mm wafer facedown contacting only the wafer’s edges.
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Process wafer carriers, for 150 mm wafer handling, 182/190/194 Series
Supplier: ENTEGRIS
182 Series
The industry standard 150 mm process wafer carrier. Four-point contact on the 'H' bar for improved wafer positioning. Open sidewall design to minimise liquid traps and promote even solution coverage and drainage. High profile design for maximum wafer protection.
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Pipe fittings, straight, PureBond®
Supplier: ENTEGRIS
These pipe fittings are made from PFA.
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Fluid aspirator, Galtek®
Supplier: ENTEGRIS
Galtek® aspirator is ideal for the extraction and/or dilution of fluids from chemical tanks.



