GateKeeper® GPU 20M 12, 16R Gas Purifiers
ENTEGPUS20MFOP12R0
: ENTEGRIS
- Material:Stainless steel 316L
- Description:Gas purifier, GateKeeper® GPU 20M 12R, with isolation valves
- Model:20M
- Pressure drop:1,31 bar-D
- Gases purified:CDA, O₂, N₂, Ar, He, Ne, Kr, Xe
- Outlet purity:<100 pptV in H₂O
- Outlet particle filtration:0,0015 µm
- Leak rating:1×10⁻⁹ atm cc/sec
- Fitting size:³/₄"
- Filter:0,0015 µm
- Ø×L:152,4×1290 mm
- Max. operating pressure:25,5 bar (Purifier only)
17,23 bar (with options) - Inlet/outlet:Male/male
- Max. flow rate:2000 slpm
- Max. operating temperature:0...65 °C
- Media:OP
- Weight:34 kg
- Pk:1
GateKeeper® GPU gas purifiers are designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical.
- Purity control below part-per-billion (ppb) levels
- Low pressure drop through the purifier
- Regenerable - eliminates disposal issues and costs
- Long lifetime - improves cost of ownership
- Insensitive to orientation (horizontal / vertical)
Uses ambient temperature purification - no heat or power required to operate.
Applications include semiconductor, data storage, flat panel display, LED and solar.
: Manufactured in an ISO® 9001:2015 facility.