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GateKeeper® GPU 20M 12, 16R Gas Purifiers
GateKeeper® GPU 20M 12, 16R Gas Purifiers
  ENTEGPUS20MFOP12R0
 :  ENTEGRIS
New Product
GateKeeper® GPU 20M 12, 16R Gas Purifiers
  ENTEGPUS20MFOP12R0
 :  ENTEGRIS
New Product

 

  • Material:
    Stainless steel 316L
  • Description:
    Gas purifier, GateKeeper® GPU 20M 12R, with isolation valves
  • Environmentally Preferable:
  • Model:
    20M
  • Pressure drop:
    1,31 bar-D
  • Gases purified:
    CDA, O₂, N₂, Ar, He, Ne, Kr, Xe
  • Outlet purity:
    <100 pptV in H₂O
  • Outlet particle filtration:
    0,0015 µm
  • Leak rating:
    1×10⁻⁹ atm cc/sec
  • Fitting size:
    ³/₄"
  • Filter:
    0,0015 µm
  • Ø×L:
    152,4×1290 mm
  • Max. operating pressure:
    25,5 bar (Purifier only)
    17,23 bar (with options)
  • Inlet/outlet:
    Male/male
  • Max. flow rate:
    2000 slpm
  • Max. operating temperature:
    0...65 °C
  • Media:
    OP
  • Weight:
    34 kg
  • Pk:
    1

 

 

GateKeeper® GPU gas purifiers are designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical.

  • Purity control below part-per-billion (ppb) levels
  • Low pressure drop through the purifier
  • Regenerable - eliminates disposal issues and costs
  • Long lifetime - improves cost of ownership
  • Insensitive to orientation (horizontal / vertical)

Uses ambient temperature purification - no heat or power required to operate.

Applications include semiconductor, data storage, flat panel display, LED and solar.

 : Manufactured in an ISO® 9001:2015 facility.