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GateKeeper® GPU 17M 12R Gas Purifier
GateKeeper® GPU 17M 12R Gas Purifier
Catalog # ENTEGPUS17MFIX12R0
Supplier:  ENTEGRIS
GateKeeper® GPU 17M 12R Gas Purifier
Catalog # ENTEGPUS17MFIX12R0
Supplier:  ENTEGRIS

Specifications

  • Material:
    Stainless steel 316L
  • Description:
    Gas purifier, GateKeeper® GPU 17M 12R
  • Environmentally Preferable:
  • Model:
    17M
  • Outlet purity:
    <100 pptV in H₂O, O₂, CO, CO₂, <1 ppbV in sulfur compounds
  • Outlet particle filtration:
    0,0015 µm
  • Leak rating:
    1×10⁻⁹ atm cc/sec
  • Fitting size:
    ³/₄"
  • Filter:
    0,0015 µm
  • Ø×L:
    152,4×1085 mm
  • Max. operating pressure:
    25,5 bar (Purifier only)
    17,23 (with options)
  • Inlet/outlet:
    Male/male
  • Max. flow rate:
    2000 slpm
  • Max. operating temperature:
    0...65 °C
  • Media:
    IX
  • Weight:
    29,5 kg
  • Pk:
    1

Specifications

About this item

Entegris’ GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of IX gas purification products that deliver unsurpassed value and performance.

  • Purity control below part-per-billion (ppb) levels
  • Low pressure drop through the purifier
  • Cost effective
  • Regenerable - eliminates disposal issues and costs
  • Long lifetime - improves cost of ownership
  • Safe and simple to use
  • Ambient temperature purification - no heat or power required to operate
  • Insensitive to orientation (horizontal/vertical)

Applications: Semiconductor, data storage, flat panel display, LED, solar

Certifications: Manufactured in an ISO® 9001:2015 facility. Designed in accordance with ASME®.