GateKeeper® GPU 17M 12R Gas Purifier
ENTEGPUS17MFIX12R0
: ENTEGRIS
- Material:Stainless steel 316L
- Description:Gas purifier, GateKeeper® GPU 17M 12R
- Model:17M
- Outlet purity:<100 pptV in H₂O, O₂, CO, CO₂, <1 ppbV in sulfur compounds
- Outlet particle filtration:0,0015 µm
- Leak rating:1×10⁻⁹ atm cc/sec
- Fitting size:³/₄"
- Filter:0,0015 µm
- Ø×L:152,4×1085 mm
- Max. operating pressure:25,5 bar (Purifier only)
17,23 (with options) - Inlet/outlet:Male/male
- Max. flow rate:2000 slpm
- Max. operating temperature:0...65 °C
- Media:IX
- Weight:29,5 kg
- Pk:1
Entegris’ GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of IX gas purification products that deliver unsurpassed value and performance.
- Purity control below part-per-billion (ppb) levels
- Low pressure drop through the purifier
- Cost effective
- Regenerable - eliminates disposal issues and costs
- Long lifetime - improves cost of ownership
- Safe and simple to use
- Ambient temperature purification - no heat or power required to operate
- Insensitive to orientation (horizontal/vertical)
Applications: Semiconductor, data storage, flat panel display, LED, solar
: Manufactured in an ISO® 9001:2015 facility. Designed in accordance with ASME®.