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Gas purifiers, GateKeeper® GPU 500 4R
 :  ENTEGRIS
 
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Gas purifiers, GateKeeper® GPU 500 4R
 :  ENTEGRIS

 

  • Catalog No:
  • 568-0893
  • 568-0894
  • 568-0892
  • Model:
  • 500
  • 500
  • 500
  • Material:
  • Stainless steel, electrolytically polished
  • Stainless steel, electrolytically polished
  • Stainless steel, electrolytically polished
  • Gases purified:
  • N₂, noble gases, freon 13, 14, 23, 41, 116, 218
  • CDA, N₂, nobel gases
  • H₂, N₂, nobel gases, H₂/N₂, H₂/nobel gases
  • Outlet purity:
  • <100 ppt in Ar and N₂
  • <100 ppt in N₂
  • <100 ppt in H₂ and N₂
  • Outlet particle filtration:
  • 0,003 µm
  • 0,003 µm
  • 0,003 µm
  • Media:
  • IX
  • OP
  • HX
  • Min. operating pressure:
  • 1,01 bar
  • 1,01 bar
  • 1,01 bar
  • Max. operating pressure:
  • 41,3 bar
  • 41,3 bar
  • 41,3 bar
  • Leak rating:
  • 1 × 10-9 atm cc/sec
  • 1 × 10-9 atm cc/sec
  • 1 × 10-9 atm cc/sec
  • Max. operating temperature:
  • 65 °C
  • 65 °C
  • 65 °C
  • Max. flow rate:
  • 75 slpm
  • 75 slpm
  • 75 slpm
  • Nominal flow rate:
  • 13 slpm
  • 27 slpm
  • 26 slpm
  • Fitting size:
  • 1⁄4" gasket seal
  • 1⁄4" gasket seal
  • 1⁄4" gasket seal
  • Inlet/outlet:
  • Male/male
  • Male/male
  • Male/male
  • Filter:
  • 0,003 µm
  • 0,003 µm
  • 0,003 µm
  • Ø×L:
  • 76×201,7 mm
  • 76×201,7 mm
  • 76×201,7 mm
  • Weight:
  • 1,8 kg
  • 1,8 kg
  • 1,8 kg

 

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