"ENTEGRIS"
Cartridge filters, Panelgard® 1-2-3 UPE and PDP
Supplier: ENTEGRIS
These disposable point of use filters are well suited for small to mid-volume process fluid filteration needs.
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Multiple wafer shipping boxes for 100 mm (4") wafer handling, Ultrapak® series
Supplier: ENTEGRIS
Ultrapak® series multiple wafer shipping boxes are made of Ultrapure polypropylene materials that provide a clean shipping environment and assure low levels of condensable inorganics.
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Galtek® Check Valves, ³/₄" Orifice, O-ring Free Design E
Supplier: ENTEGRIS
Corrosion-resistant Galtek® check valves reduce contamination potential in your high-purity chemical applications and provide clean delivery of sophisticated chemicals.
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Horizontal wafer shippers, 150 mm SmartStack®
Supplier: ENTEGRIS
Horizontal wafer shipper.
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Cartridge filters, Optimizer® PR 16 and PR 40
Supplier: ENTEGRIS
The UPE membrane of these filters eliminates pre-wetting, which optimises the full use of the membrane and ensures maximum flow.
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Gas purifiers, GateKeeper® GPU 70 4R
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance.
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InVue® NT4400 Electronic Flowmeters
Supplier: ENTEGRIS
The InVue® NT4400 Electronic Flowmeter is designed for use in ultra high-purity applications in the semiconductor industry and is compatible with highly corrosive processes. The flowthrough design minimizes dead volume, reducing the possibility of process contamination. This instrument features PTFE and other high purity fluoropolymers for all wetted parts.
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Single film frame shippers
Supplier: ENTEGRIS
Film frame shippers provide a convenient, safe and ergonomic means to ship and store wafers mounted on film frames. Film frame shippers are designed to protect the frame and to prevent any contact with the wafer surface.
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GateKeeper® GPU SP70, SP300, SP600 Gas Purifiers
Supplier: ENTEGRIS
GateKeeper® GPU purifiers are the most complete and reliable solution for point-of-use (POU) gas purification.
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Manually operated diaphragm valves, Integra®
Supplier: ENTEGRIS
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three and one-half complete turns fully opens or closes the valve for more precise control than a ¹/₄-turn valve. Slower actuation reduces water hammer affect on fluid stream. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosion chemical handling applications.
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Cartridge filters, Fluorogard® AT
Supplier: ENTEGRIS
These filters are designed to consistantly remove particles from a whide range of acids, bases and other process materials. Ideal for medium to high flow applications, they deliver a low cost of ownership (COO) as a dry device or prewet product ready for quick installation. Prewet cartridges prevent alcohol-chemical interactions, avoid potential contamination sources and minimise process downtime.
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Wafer shipping boxes, Ultrapak® series
Supplier: ENTEGRIS
Wafershield™ high purity PP
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Cartridge filter, Guardian™ HPX
Supplier: ENTEGRIS
This cartridge filter with high flow and efficient particle removal, ensures rapid particle removal in one-pass and recirculating applications. It eliminates the trace levels of ions and improves the quality of ultrapure water.
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Pneumatically operated diaphragm valves, Galtek® SG series
Supplier: ENTEGRIS
This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.



