"ENTEGRIS"
Pneumatically operated diaphragm valves, Integra®
Supplier: ENTEGRIS
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Allows continuous flow through parallel ports. When actuated, the sample port opens allowing fluid to flow out or in. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.
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Wafer shipping system, horizontal, SmartStack®
Supplier: ENTEGRIS
SmartStack® horizontal wafer shipping system is designed to reduce wafer breakage, die bond corrosion and particle contamination. These shipping system is designed to utilize common secondary packaging across wafer sizes, and the result is reduction in the number of pacvkaging configurations and wafer packing process. With additional layer of protection it is easy to maintain wafer integrity during transport and shipping.
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GateKeeper® HGU Heated Getter Purifiers
Supplier: ENTEGRIS
GateKeeper® Heated Getter Units (HGU) are ideal solutions for point-of-use purification where CH4 or N2 impurity removal is required. Gases purified include Ar, He, Xe, N2, and H2.
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Mask packages, H 92 series
Supplier: ENTEGRIS
Provides excellent security for masks or reticles with pellicles.
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GateKeeper® GPU 20M 12, 16R Gas Purifiers
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers are designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical.
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Cartridge filters, Fluorogard® FP
Supplier: ENTEGRIS
These filters can be used in solvent based photochemicals without the need for prewetting steps.
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Wafer carriers, for 100 mm (4") wafer handling, 72/182 and 190 series
Supplier: ENTEGRIS
These 100 mm wafer carriers are designed for optimum performance in automated operations or for processing LCDs and other small devices.
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Wafer storage boxes for 125 mm (5") wafer handling, E 89/E 93 series
Supplier: ENTEGRIS
Two snap latches, one swing pin latch or three swing pin latches. Pin and socket hinges.
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Disposable filters, Optimizer® D PR and D PR-L
Supplier: ENTEGRIS
These filters are designed for small to mid volume POU photochemical and solvent filtration needs. They can be used for the hydrophobic filtration of photoresists, thinners and solvents.
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Wafer carriers, for 2,5" and smaller wafer handling
Supplier: ENTEGRIS
2,25" wafer carriers, Pocket spacing: 4,76 mm, pocket flat: 1,52 mm, 25 wafers, PFA, ufarvet
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NPT fittings
Supplier: ENTEGRIS
Straight reducer, with hex 1 7/16", Hul Ø: 19,0 mm, Længde: 48,8 mm, Bredde: 36,1 mm, Gevind: FNPT size 3/4", MNPT size 1"
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Cartridge filters, Panelgard® 1-2-3 UPE and PDP
Supplier: ENTEGRIS
These disposable point of use filters are well suited for small to mid-volume process fluid filteration needs.
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Tube fittings, straight, Quikgrip®
Supplier: ENTEGRIS
These tube fittings are made from PFA.
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Wafer shipping boxes, Ultrapak® series
Supplier: ENTEGRIS
Wafershield™ high purity PP
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InVue® NT4400 Electronic Flowmeters
Supplier: ENTEGRIS
The InVue® NT4400 Electronic Flowmeter is designed for use in ultra high-purity applications in the semiconductor industry and is compatible with highly corrosive processes. The flowthrough design minimizes dead volume, reducing the possibility of process contamination. This instrument features PTFE and other high purity fluoropolymers for all wetted parts.
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Adapter fittings, Cynergy®
Supplier: ENTEGRIS
Cynergy® Clamp-to-Flaretek® adapter. These adapters show standard Entegris® fitting port connections used in conjunction with Cynergy® clamp fittings.



