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"ENTEGRIS"

 
 
Single wafer shippers for wafer size 76,2 (3"), 86,2 (3,25") or 90 mm

Single wafer shippers for wafer size 76,2 (3"), 86,2 (3,25") or 90 mm

Supplier: ENTEGRIS

Conical pocket holds one wafer face down contacting only the wafer edges.

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Tube fittings, elbows, FlareLock® II

Supplier: ENTEGRIS

These tube fittings are made from PFA.

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Cartridge filters, Impact® 2 V2

Supplier: ENTEGRIS

Superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents.

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Wafer baskets

Supplier: ENTEGRIS

These wafer baskets made of PFA are designed for processing and handling substrates. They are compatible with tanks and handles.

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Tube fittings, elbows, Quikgrip®

Supplier: ENTEGRIS

These tube fittings are made from PFA.

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Cartridge filters, ProcessGard® PP

Cartridge filters, ProcessGard® PP

Supplier: ENTEGRIS

These cartridge filters are suited for acids, bases, process water, solvents, dyes and lacquers in flat panel display and chemical manufacturing.

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Wafer carrier handles for 150 mm wafer handling

Wafer carrier handles for 150 mm wafer handling

Supplier: ENTEGRIS

Squeeze style
Attaches to the notches on both end walls of carrier
Overall size: 163×140×183 mm
Compatible with all 'M' style carriers

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Handles for device carriers

Supplier: ENTEGRIS

Squeeze style handles.

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Forceps

Supplier: ENTEGRIS

Glass-filled PP, white. Straight forceps for substrate handling.

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Pneumatically operated diaphragm valves, Integra®

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Allows continuous flow through parallel ports. When actuated, the sample port opens allowing fluid to flow out or in. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

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Wafer shipping system, horizontal, SmartStack®

Supplier: ENTEGRIS

SmartStack® horizontal wafer shipping system is designed to reduce wafer breakage, die bond corrosion and particle contamination. These shipping system is designed to utilize common secondary packaging across wafer sizes, and the result is reduction in the number of pacvkaging configurations and wafer packing process. With additional layer of protection it is easy to maintain wafer integrity during transport and shipping.

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GateKeeper® HGU Heated Getter Purifiers

Supplier: ENTEGRIS

GateKeeper® Heated Getter Units (HGU) are ideal solutions for point-of-use purification where CH4 or N2 impurity removal is required. Gases purified include Ar, He, Xe, N2, and H2.

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Mask packages, H 92 series

Supplier: ENTEGRIS

Provides excellent security for masks or reticles with pellicles.

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GateKeeper® GPU 20M 12, 16R Gas Purifiers

Supplier: ENTEGRIS

GateKeeper® GPU gas purifiers are designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical.

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Cartridge filters, Fluorogard® FP

Cartridge filters, Fluorogard® FP

Supplier: ENTEGRIS

These filters can be used in solvent based photochemicals without the need for prewetting steps.

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