"ENTEGRIS"
Single wafer shippers for wafer size 76,2 (3"), 86,2 (3,25") or 90 mm
Supplier: ENTEGRIS
Conical pocket holds one wafer face down contacting only the wafer edges.
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Tube fittings, elbows, FlareLock® II
Supplier: ENTEGRIS
These tube fittings are made from PFA.
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Cartridge filters, Impact® 2 V2
Supplier: ENTEGRIS
Superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents.
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Wafer baskets
Supplier: ENTEGRIS
These wafer baskets made of PFA are designed for processing and handling substrates. They are compatible with tanks and handles.
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Tube fittings, elbows, Quikgrip®
Supplier: ENTEGRIS
These tube fittings are made from PFA.
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Wafer Storage Boxes for 150 mm Wafer Handling, E 99, E 210 and HA 200 Series
Supplier: ENTEGRIS
E 99 Series
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Cartridge filters, ProcessGard® PP
Supplier: ENTEGRIS
These cartridge filters are suited for acids, bases, process water, solvents, dyes and lacquers in flat panel display and chemical manufacturing.
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Wafer carrier handles for 150 mm wafer handling
Supplier: ENTEGRIS
Squeeze style
Attaches to the notches on both end walls of carrier
Overall size: 163×140×183 mm
Compatible with all 'M' style carriers
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Forceps
Supplier: ENTEGRIS
Glass-filled PP, white. Straight forceps for substrate handling.
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Pneumatically operated diaphragm valves, Integra®
Supplier: ENTEGRIS
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Allows continuous flow through parallel ports. When actuated, the sample port opens allowing fluid to flow out or in. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.
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Wafer shipping system, horizontal, SmartStack®
Supplier: ENTEGRIS
SmartStack® horizontal wafer shipping system is designed to reduce wafer breakage, die bond corrosion and particle contamination. These shipping system is designed to utilize common secondary packaging across wafer sizes, and the result is reduction in the number of pacvkaging configurations and wafer packing process. With additional layer of protection it is easy to maintain wafer integrity during transport and shipping.
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GateKeeper® HGU Heated Getter Purifiers
Supplier: ENTEGRIS
GateKeeper® Heated Getter Units (HGU) are ideal solutions for point-of-use purification where CH4 or N2 impurity removal is required. Gases purified include Ar, He, Xe, N2, and H2.
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Mask packages, H 92 series
Supplier: ENTEGRIS
Provides excellent security for masks or reticles with pellicles.
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GateKeeper® GPU 20M 12, 16R Gas Purifiers
Supplier: ENTEGRIS
GateKeeper® GPU gas purifiers are designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical.
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Cartridge filters, Fluorogard® FP
Supplier: ENTEGRIS
These filters can be used in solvent based photochemicals without the need for prewetting steps.



