"ENTEGRIS"

Supplier: ENTEGRIS

These filters are designed for small to mid volume POU photochemical and solvent filtration needs. They can be used for the hydrophobic filtration of photoresists, thinners and solvents.

Supplier: ENTEGRIS

These pipe fittings are made from PFA.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Three-ported directional valve enables simplification of piping system design while minimising its footprint. All PFA wetted surfaces for ultrapure and corrosion resistant performance.

Supplier: ENTEGRIS

These cartridge filters are constructed of PTFE pleated membranes with PP supports to provide durability and cleanliness for filtration of process fluids used in the electronics industry.

Supplier: ENTEGRIS

High performance, disposable filters for low flow applications. These filters provide compatibility with a wide range of acids, bases and non flammable solvents at ambient temperatures.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Allows continuous flow through parallel ports. When actuated, the sample port opens allowing fluid to flow out or in. All wetted parts are molded PFA providing chemical resistance suitable for use in high purity, high corrosive chemical handling applications.

Supplier: ENTEGRIS

The Sentry® QCIII Quick Connect System is the safest and easiest method of connecting FluoroPure® chemical containers with typical bulk chemical delivery systems. This patented connection system is key coded and uses Entegris' industry leading Flaretek® seal for the main chemical dispense line and radial seals for the remaining three ports. This new system allows the connection to be made without realigning key codes. Subsequent ports have radial seals with FEP encapsulated o-rings. This chemical dispense system incorporates a ³/₄" chemical fill/dispense port, ½" vent port, ¼" connection verification port and optional ³/₄" recirculation port.

Supplier: ENTEGRIS

These filter disc series with non-woven PP media can be used for simple, quick and efficient filtration of fluids used in laboratory, pilot and small scale applications. Can be used for clarification of acids, bases and solvents.

Supplier: ENTEGRIS

For masks or reticles with pellicles. Label for identication labels. Landing pads prevent tearing of pellicies.

Supplier: ENTEGRIS

Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. All PFA valve body and high purity fluoropolymer wetted components for use in high purity, highly corrosive chemical handling applications.

Supplier: ENTEGRIS

The point-of-use photochemical filters with superior contaminant retention and low hold-up volume performance in sub-10 to 180 nm technology nodes. Both Optimizer® D300 and D600 filters are geared to small-volume filtration of photoresists, resist dielectrics, and solvents. It requires no pre-wetting, so the filters function immediately after installation. Without the need for prewetting, they reduce the likelihood that microbubbles will form and avoid the problems associated with incomplete wetting and the mixing of incompatible chemicals.

Supplier: ENTEGRIS

These filter disc series can be used for simple, quick and efficient filtration of fluids used in laboratory, pilot and small scale applications.

Supplier: ENTEGRIS

These point-of-use filters meet small to mid-volume photochemical filtration needs for positive developer and DI water applications. Both Optimizer® DEV filters (for developer applications) and Optimizer® DI filters (for DI water applications) require no pre-wetting, so the filters function immediately after installation. The design also limits the handling of hazardous chemicals during the installation and promotes a healthier workplace. Do not use either filter with aromatic hydrocarbons.

Supplier: ENTEGRIS

Photochemical filter with superior contaminant retention and low hold-up volume performance in sub-10 to 180 nm technology nodes.

Supplier: ENTEGRIS

Liquid photochemical filters designed for developer, DI water and solvent applications in POU photolithography processes.

Supplier: ENTEGRIS

Kapton® wrap for 1/2” and 3/4” components, Til: Cynergy Weld-in-Place